A kind of silver/silver chloride reference electrode and preparation method thereof

Abstract

The invention provides an Ag / AgCl reference electrode, and a manufacturing method thereof. According to the Ag / AgCl reference electrode, a silicon chip 1 of the Ag / AgCl reference electrode is providedwith a liquid storage pool 4 used for storing potassium chloride saturated solution; a connecting pool 8 is arranged next to the liquid storage pool 4; a plurality of nanometer pipelines 7 are arranged between the liquid storage pool 4 and the connecting pool 8 in parallel, and are used for ion exchange, and a nanometer pipeline 7 array is formed; a platinum electrode lead wire 2 is arranged fromthe bottom of the liquid storage pool 4 to the upper surface of the silicon chip 1 along a single side wall; the upper surface of a tail end of the platinum electrode lead wire 2 is provided with a silver / silver chloride electrode layer 5; the upper surface of the silicon chip 1 is covered with a Pyrex 7740 glass cover plate 3 through bonding; the Pyrex 7740 glass cover plate 3 is provided with aliquid injection hole 6, and is provided with a sealant 9. The nanometer pipeline 7 array is capable of reducing ion exchange speed greatly, so that the using time of the potassium chloride saturatedsolution and the service life of the Ag / AgCl reference electrode can be prolonged obviously; the manufacturing method is invented based on micro-nano machining, integrated manufacturing with other electrodes can be realized, and micromation of detection sensors is realized.

Description

technical field [0001] The invention relates to an Ag / AgCl reference electrode and a manufacturing method thereof, belonging to the technical field of sensors. Background technique: [0002] The reference electrode (Reference Electrode, referred to as RE) is an electrode used as a reference comparison when measuring various electrode potentials. The electrode to be measured and the reference electrode with an accurately known electrode potential value form a battery, and the electromotive force value of the battery can be measured. Calculate the electrode potential of the measured electrode. Generally, a slightly soluble salt electrode is used as a reference electrode. Commonly used reference electrodes include calomel electrodes and silver-silver chloride electrodes. In addition, there are copper-copper sulfate electrodes, quinhydrone electrodes, and solid reference electrodes. [0003] The potential of the reference electrode is constant, and its main function is to measu...

AI Technical Summary

Problems solved by technology

However, in the field of sensors, it can only be used in combination with other electrodes, and cannot be integrated with other electrodes on a sensor chip, which limits its application in sensors.

Many research institutions have developed miniature Ag / AgCl all-solid-state reference electrodes based on micro-nano manufacturing technology, but because the potassium chloride saturated solution required by the electrode has a short storage time on the electrode surface, the service life of the electrode is not long. Can not meet the requirements of long-term continuous work of the sensor

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