Preparation method of colorful crystalline silicon cell sheet
A technology for crystalline silicon cells and cells, which is applied in the manufacture of circuits, electrical components, and final products. It can solve the problems of poor uniformity of film color between sheets, low yield, and poor process repeatability, so as to improve uniformity and consistency. , repeatability and yield improvement effect
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Embodiment 1
[0021] Step 1: In order to obtain solar cells with a golden appearance, set the coating process as shown in Table 1:
[0022] Table 1: Appearance film color process formula
[0023]
[0024] Step 2: Insert the silicon wafer to be coated into the graphite boat and enter the coating furnace tube;
[0025] Step 3: Vacuumize the furnace tube and keep the temperature at 450°C;
[0026] Step 4: Introduce silane and ammonia gas, and perform coating according to the coating process set in step 1, and set the process pressure to 1800mTorr, and the duty ratio to 4:35;
[0027] Step 5: After the furnace tube is cleaned and vacuumed, press back out of the boat;
[0028] Step 6: After the graphite boat cools down, unload the battery slices from the boat.
Embodiment 2
[0030] Step 1: In order to obtain solar cells with a green appearance, set the coating process as shown in Table 2:
[0031] Table 2: Appearance film color process formula
[0032]
[0033] Step 2: Insert the silicon wafer to be coated into the graphite boat and enter the coating furnace tube;
[0034] Step 3: Vacuumize the furnace tube and keep the temperature at 450°C;
[0035] Step 4: Introduce silane and ammonia gas, and perform coating according to the coating process set in step 1, and set the process pressure to 1800mTorr, and the duty ratio to 4:35;
[0036] Step 5: After the furnace tube is cleaned and vacuumed, press back out of the boat;
[0037] Step 6: After the graphite boat cools down, unload the battery slices from the boat.
Embodiment 3
[0039] Step 1: In order to obtain solar cells with a light yellow appearance, set the coating process as shown in Table 3:
[0040] Table 3: Appearance film color process formula
[0041]
[0042] Step 2: Insert the silicon wafer to be coated into the graphite boat and enter the coating furnace tube;
[0043] Step 3: Vacuumize the furnace tube and keep the temperature at 450°C;
[0044] Step 4: Introduce silane and ammonia gas, and perform coating according to the coating process set in step 1, and set the process pressure to 1800mTorr, and the duty ratio to 4:35;
[0045] Step 5: After the furnace tube is cleaned and vacuumed, press back out of the boat;
[0046] Step 6: After the graphite boat cools down, unload the battery slices from the boat.
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