T-shaped four-cantilever beam type electronic calibration member switch

Abstract

The invention relates to a T-shaped four-cantilever beam type electronic calibration member switch comprising a substrate for providing brace foundation, a microwave transmission component arranged onthe substrate, and a packaging component for packaging the microwave transmission component; the microwave transmission component comprises signal wire units arranged in a symmetric way, ground wireunits arranged at the peripheral sides of the signal wire units, an air bridge unit conducting to the ground wire units and a driving electrode arranged below the signal wire units. Compared with conventional single-pole double-throw switches, the T-type four-cantilever beam type electronic calibration member switch has obvious advantages, and a radio frequency MEMS switch has four cantilever beams to form a symmetric structure, so that insertion loss is reduced, return loss is promoted, and the isolation of the switch is excellent. Therefore, the life and the microwave performance of the switch are promoted. Electronic calibration of DC-40GHz can be realized, circuit complexity is reduced, calibration process is simplified, calibration efficiency and calibration accuracy are improved, andapplication of the radio frequency MEMS switch in the field of calibration of a vector network analyzer of a higher frequency band is realized.

Description

technical field [0001] The invention belongs to the technical field of electronic components, and in particular relates to a T-shaped four-cantilever-beam electronic calibration switch. Background technique [0002] Compared with mechanical calibration components, electronic calibration components have the advantages of automatic calibration, small size, light weight, and high calibration accuracy. They can provide precise, single-connection and multiple-calibration calibration methods for vector network analyzers. ECal modules use electronic impedance standards that are fully traceable and verifiable in accuracy. The required impedance criteria include open circuit, short circuit, and load, etc., which are realized by switching devices. Switching devices form the hardware basis of electronic calibration, and the most commonly used ones are FET switches. Its main disadvantages are poor standing wave characteristics, large insertion loss, and high power consumption, especia...

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Problems solved by technology

The 41st Research Institute of China Electronics Technology Group Corporation designed an electronic calibration device based on MEMS switches (application number: CN201310250462.4). By using the MEMS switch RMSW221 to replace the field effect switching device AMMC-2008, the circuit complexity was reduced. , which improves the calibration efficiency and calibration accuracy, but the microwave characteristics of the electronic calibration part of the MEMS switch used in the DC-20GHz range deteriorates as the frequency increases

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