Multi-film continuous coating device and method

Abstract

The invention discloses a multi-film continuous coating device and method. The device comprises a surface treatment chamber, a multi-film coating chamber and a substrate outlet vacuum chamber which are connected in sequence; each chamber is provided with a workpiece reciprocating moving mechanism; and the workpiece reciprocating moving mechanisms are arranged below a substrate frame, a magnetic steering mechanism is arranged above the substrate frame, active drive supporting wheels and driven bearing wheels in the workpiece reciprocating moving mechanisms are arranged on a mounting support inthe vacuum chamber, the multiple driven bearing wheels are distributed between two adjacent active drive supporting wheels, and under driving of the active drive supporting wheels, the substrate framedoes reciprocated moving along the driven bearing wheels and the magnetic steering mechanism. The method comprises the steps that the workpiece reciprocating moving mechanisms drive the substrate frame and a workpiece to do reciprocated moving in the surface treatment chamber, and repeated surface roughening and cleaning treatment are achieved; reciprocated moving in the multi-film coating chamber is carried out, and multi-film coating is achieved; and finally, the workpiece is conveyed out from the substrate outlet vacuum chamber. The equipment structure can be effectively simplified, and the coating efficiency and the coating uniformity are improved.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a multi-layer continuous coating equipment and method. Background technique [0002] In the existing vacuum coating equipment, whether it is a linear coating equipment or a winding coating equipment, the coating method of the workpiece or the substrate is coated in one continuous pass. In this case, the coating equipment generally It is necessary to set up multiple vacuum coating chambers or multiple coating units connected continuously, as well as multiple targets for multiple coatings, so that the thickness of the film layer can reach the desired thickness. In actual production, the equipment structure of this method is huge and complex, and the equipment cost is high. At the same time, because the vacuum degree in different coating chambers is difficult to achieve a high degree of consistency, even if the workpiece or substrate passes through multiple coatings continuou...

AI Technical Summary

Problems solved by technology

In actual production, the equipment structure of this method is huge and complex, and the equipment cost is high. At the same time, because the vacuum degree in different coating chambers is difficult to achieve a high degree of consistency, even if the workpiece or substrate passes through multiple coatings continuously, the uniformity of the surface film layer degree is also difficult to guarantee

In addition, the workpiece is generally conveyed by the structure of friction rollers. This method is prone to slipping when the equipment is running at high speed, which affects the normal conveying of the workpiece and the coating quality of the workpiece surface.

[0003] In addition, in the existing vacuum coating equipment, the target door generally adopts a side-opening structure, but for large-scale equipment, this opening method is very inconvenient to operate, and the replacement or maintenance cost of the target is quite high

In order to facilitate installation, a target tube with a small diameter (generally less than 150mm) is generally used, the sputtering area is small, and the coating efficiency is also low, so it is difficult to achieve fast coating operations.

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