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A Method for Simultaneously Measuring Stress and Optical Loss of Single-Layer Optical Components

A technology of optical components and optical loss, applied in optical instrument testing, force/torque/work measuring instruments, measuring devices, etc., can solve the problems of inability to realize multi-parameter measurement of optical components, cumbersome process, complex system, etc.

Active Publication Date: 2020-09-22
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] To sum up, the stress and optical loss of single-layer film optical components need to be measured separately by different measurement methods and instruments. Evaluation creates uncertainty

Method used

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  • A Method for Simultaneously Measuring Stress and Optical Loss of Single-Layer Optical Components
  • A Method for Simultaneously Measuring Stress and Optical Loss of Single-Layer Optical Components
  • A Method for Simultaneously Measuring Stress and Optical Loss of Single-Layer Optical Components

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example 1

[0035] The sample to be tested in Example 1 of the present invention is a fused silica substrate with a diameter of 25.4mm and a thickness of 2mm, and the surface is plated with a single layer of Ta 2 o 5 membrane.

[0036] figure 2 is the initial cavity ring-down signal Ss collected by the photodetector (10) and the photodetector (11) 0 and Sp 0 The sum ringdown signal S obtained after summing at unity gain 0 , fit and residuals. in, figure 2 Use a black "o" to indicate and ringdown signal S 0 Amplitude; use the brown solid line with "×" to indicate the formula according to the single exponential model Fitted ring-down signal amplitude; ring-down signal fit residuals are shown with a solid gray line. Initial lumen length L 0 = 0.201 meters, the initial cavity ring-down time obtained by fitting is τ 0 = 13.067 μs.

[0037] image 3 It is the ring-down signal Sp collected by the photodetector (11) by adding the sample in the resonant cavity 1 , fit and residuals...

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Abstract

The invention relates to a method for simultaneously measuring the stress and optical loss of a single-layer film optical element, wherein: a beam of linearly polarized laser light entering an optical resonant cavity is subject to the stress birefringence effect of the optical element to be measured placed in the cavity perpendicular to the laser beam After modulation, it emerges from the resonant cavity. The outgoing light is divided into two beams of linearly polarized light by a polarization state detection device composed of a quarter-wave plate and a polarizing prism, which are respectively focused by a focusing lens and then detected by two photodetectors. The gain ratio of the two photodetectors is Already calibrated. The incident laser beam is turned off, and two groups of optical cavity ring-down signals are collected by two photodetectors. Fit any group of ring-down signals or two groups simultaneously to obtain the stress birefringence phase difference and optical loss value of the optical element; or add and fit the two groups of signals with uniform gain to obtain the optical loss value. The technical solution proposed by the invention has the advantages of simple system structure, high measurement accuracy, and can simultaneously measure the residual stress and optical loss of a single-layer film optical element.

Description

technical field [0001] The invention relates to the technical field of parameter measurement of optical thin film elements, in particular to a method for simultaneously measuring residual stress and optical loss of single-layer film optical elements. Background technique [0002] In the process of designing and manufacturing optical multilayer films, it is first necessary to evaluate and verify the coating process by coating a single-layer film. Important parameters evaluated are refractive index, extinction coefficient, film thickness, residual stress, and optical loss. Among them, the evaluation of the residual stress of the single-layer film is related to the reliability of the multi-layer film plating. If the single-layer film has a strong residual stress, it will not only affect the electromagnetic and mechanical properties of the multi-layer film plated based on the single-layer film preparation parameters, but even Lead to peeling and detachment of the film layer. C...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M11/02G01L5/00
CPCG01L5/00G01M11/00
Inventor 李斌成肖石磊王静
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA