In-situ composite loading and measuring device for micro-nano samples

Abstract

The invention provides an in-situ composite loading and measuring device for micro-nano samples. In a spatial rectangular coordinate system which takes X, Y and Z as coordinate axes, the device includes a left loading adjustment module and a right loading adjustment module in order in the positive direction of the X coordinate axis; the left loading adjustment module contains a left rotating piezoelectric ceramic motor (3), a left vertical linear piezoelectric ceramic motor (4) and a left horizontal linear piezoelectric ceramic motor (5) which are connected in order in the positive direction of the X coordinate axis; and the right loading adjustment module contains a right connecting block (12) and a right advancing linear piezoelectric ceramic motor (13) which are connected in order in adirection of the Z coordinate axis. The device is small in size, compact in structure and high in test precision, and can perform cross-scale in-situ tensile bending torsion tests on test pieces, of various materials, having characteristic sizes of nanoscale or above.

Description

technical field [0001] The invention relates to an in-situ composite loading and measuring device for micro-nano samples. Background technique [0002] With the development of nanotechnology, micro-nano materials are widely used in aerospace, automotive industry, semiconductor, biomedicine, MEMS, polymer, solar energy / fuel cell chemical industry, petroleum, rock, microelectronics, microsensors, semiconductor materials, Automatic control, aerospace, automotive industry and machine tools. The microscopic mechanical properties of materials are quite different from the macroscopic classical mechanical properties. Among the many performance parameters of the micro-nano mechanical testing of materials, the tensile, bending and torsion mechanical performance testing of materials is one of the very important test objects. [0003] In-situ micro-nano mechanical performance testing technology is a cutting-edge technology developed in recent years, which has attracted great attention...

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problem of large volume and complex structure of the existing multi-functional in-situ mechanical testing platform at the micro-nano scale, the present invention provides an in-situ composite loading and measuring device for micro-nano samples. The composite loading and measuring device is small in size, compact in structure, and high in testing accuracy. It can be matched with various mainstream electron microscope vacuum chambers and has a wide range of applications. Tensile bending torsion test, combined loading test can also be performed at the same time, through dynamic observation of the microscopic deformation of materials and their products under load, to reveal the mechanical behavior and damage mechanism of materials at the micro-nano scale

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