Water squeezing roller used for wet etching

A technology of wet etching and roller, which is applied in the direction of sustainable manufacturing/processing, electrical components, climate sustainability, etc. It can solve the problems of easy pollution on the surface of silicon wafers, easy wear of water-squeezing rollers, and many defective products. Achieve the effects of not easily adsorbing impurities, saving production costs, and long service life

CN108574024AActive Publication Date: 2018-09-25HENGDIAN GRP DMEGC MAGNETICS CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2018-09-25

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Abstract

The invention relates to and provides a water squeezing roller. By using the water squeezing roller, the structure is simple, a silicon chip surface can be effectively protected during a production process, an EL bad proportion is reduced and production cost is saved. In the prior art, during a production process, the water squeezing roller is easy to wear, production cost is high, the silicon chip surface is easy to pollute, there are a lot of finished-product defective products and so on. By using the roller of the invention, the above technical problems are solved. The roller comprises a transmission wheel group and a support shaft which is transversely arranged above the transmission wheel group. A smooth surface extrusion sleeve sleeves the support shaft. A first gap is arranged between the middle hole of the smooth surface extrusion sleeve and the support shaft. A silicon chip is clamped between the transmission wheel group and the corresponding smooth surface extrusion sleeve. The silicon chip is moved towards an output side under the driving of the transmission wheel group.
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Description

technical field

[0001] The invention relates to a water squeeze roller, in particular to a water squeeze roller for wet etching which can effectively protect the surface of a silicon chip during production, reduce the proportion of EL defects and ensure the quality of the silicon chip. Background technique

[0002] In the production process of solar cells, the wet etching effect determines the corrosion effect and cleaning effect of solar cells, and has a serious impact on the control of the process. When the silicon wafer is wet-etched, during the process of being transported to each tank, the silicon wafer is clamped by the upper water squeeze roller and the lower transmission mechanism to move forward, and the water squeeze roller is fixed above the transmission mechanism. On the support shaft, the main function is to introduce the solution remaining on the surface of the silicon wafer in the previous tank to the next tank, and at the same time remove impurities on the su...

Examples

Embodiment

[0017] Such as figure 1 As shown, a water squeezing roller for wet etching of the present invention includes a drive wheel set 1 and a support shaft 2 arranged horizontally above the drive wheel set 1, and five sleeves connected end to end on the support shaft 2 A smooth extrusion sleeve 3, the smooth extrusion sleeve 3 is made of polyvinylidene fluoride, the roughness of its outer ring surface is 300 μm, and the support shaft 2 corresponding to the two ends of the smooth extrusion sleeve 3 The upper sleeve is fixed with a positioning sleeve 6, and the end surface of the smooth extrusion sleeve 3 corresponding to the positioning sleeve 6 has a counterbore 7, and the positioning sleeve 6 is located in the counterbore 7, and the middle hole of the smooth extrusion sleeve 3 is aligned with the A first gap 4 is formed between the support shafts 2, a second gap 8 is formed between the outer ring surface of the positioning sleeve 6 and the inner ring surface of the corresponding cou...