Cantilever-contact-type self-powered electrostatic acceleration sensor

Abstract

The invention provides a cantilever-contact-type self-powered electrostatic acceleration sensor. The sensor comprises a shielding shell, the shielding shell is internally provided with a contact-typefriction power generating device, the contact-type friction power generating device comprises a substrate vertically arranged in the middle of the shielding shell and cantilever arms at the two sides,the lower ends of the cantilever arms are fixed on the shielding shell, and the upper end of each cantilever arm is fixedly provided with a mass block. Dielectric material layers with opposite polarities are arranged between the cantilever arms and the substrate, when the shielding shell is at a certain acceleration, the cantilever arms and the substrate generate positive and negative charges respectively to generate a potential difference, and the acceleration can be obtained by detecting the value of the potential difference. The sensor can generate an electric signal without additionally providing energy and has the advantages of being high in efficiency and precision, environmentally friendly, wide in range, simple in structure, good in anti-interference performance, capable of savingenergy and having a self-driving property and few use limitation and the like.

Description

technical field [0001] The invention relates to an acceleration sensor device based on friction power generation technology, in particular to a cantilever contact type self-powered electrostatic acceleration sensor. technical background [0002] The cantilever contact self-powered electrostatic acceleration sensor is a good combination of friction power generation technology and system inertial force principle, and has good applicability in actual acceleration measurement. Currently commonly used acceleration sensors are capacitive acceleration sensors and resistive acceleration sensors. Among them, the capacitive acceleration sensor has the disadvantages of high output impedance, poor load capacity, easy to be affected by external interference and unstable phenomenon, even unable to work in severe cases, non-linear output characteristics, and great influence of parasitic capacitance; the resistive acceleration sensor has relatively large Non-linearity, weak output signal, ...

AI Technical Summary

Problems solved by technology

Among them, the capacitive acceleration sensor has the disadvantages of high output impedance, poor load capacity, easy to be affected by external interference and unstable phenomenon, even unable to work in severe cases, non-linear output characteristics, and great influence of parasitic capacitance; the resistive acceleration sensor has relatively large Non-linearity, weak output signal, large temperature drift and time drift, not suitable for long-term monitoring, and needs to be reflected in the external circuit or theoretical calculation compensation in the test to accurately measure the shortcomings

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