A method for transferring metal crack networks to polymer films
A polymer film and metal film technology, which is applied in the photoengraving process of the pattern surface, microlithography exposure equipment, instruments, etc., can solve the problems of inability and reduced adhesion, and achieves easy operation, low cost, and prospects. Good results
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[0027] Further explain the present invention by specific method below:
[0028] like figure 1 As shown, in step S1, a thin layer of amorphous carbon can be deposited on the substrate using a photolithographic template, for example, it can be achieved by "flashing" depositing an a-C (amorphous carbon) layer larger than 5 nm on the photolithographic template. This is done by applying a high current to the carbon wire at low gas pressure. The carbon glows and breaks during the flash, allowing the material to be deposited (a common technique for making samples conductive when making SEM coatings). Other methods of depositing carbon films can also be used.
[0029] like figure 2 As shown, depositing an a-C layer larger than 5 nm does not prevent the removal of the lithographic template, while ensuring sufficient adhesion of the metal network to the glass support. with H 2 Cleaning with O and common organic solvents and ultrasonic treatment can remove the photolithographic temp...
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