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3D measurement system of surface shape based on ray tracing

A ray tracing and three-dimensional measurement technology, applied in measurement devices, optical devices, instruments, etc., can solve the problems of difficult to measure optical surfaces with large curvature, difficult to compare and analyze design models, and increase the measurement range. , Increase the measurement slope and curvature range, and improve the effect of the applicable range

Active Publication Date: 2021-04-06
TIANJIN SINO GERMAN VOCATIONAL TECHNICAL COLLEGE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the current non-contact optical measurement is difficult to measure optical surfaces with large curvature, large slope and complex free shape.
And it is difficult to compare and analyze the results of non-contact measurement and the actual design model

Method used

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  • 3D measurement system of surface shape based on ray tracing
  • 3D measurement system of surface shape based on ray tracing
  • 3D measurement system of surface shape based on ray tracing

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041]see figure 1 , a ray tracing surface shape three-dimensional measurement system of the present invention measures transmitted samples, including a light source, a shaping and collimating lens, a micro-mirror array DMD, a TIR prism, a lens group, a sample to be measured, a lens and a precision motion mechanism The detector CCD. The system is based on the ray tracing principle and the light field representation method to obtain the wavefront information of the transmitted sample.

[0042] To build the graphic system, first remove the sample to be tested, use the computer to control the light source and the micro-mirror array DMD, encode the incident light with structured light, and control the detector CCD to move along the direction of the main light through a precise motion mechanism to obtain the position of the incident light , angle and light intensity information to complete the system calibration; place the sample to be tested at the measurement position, control t...

Embodiment 2

[0046] see figure 2 , a ray tracing three-dimensional measuring system for surface shape of the present invention measures reflective samples, including a light source, a shaping and collimating lens, a micro-mirror array DMD, a TIR prism, a beam splitting prism, a lens group, a sample to be measured, and a precise movement Mechanism detector CCD. Based on the ray tracing principle and the light field representation method, the system obtains the wavefront information and surface shape information of the reflective sample.

[0047] To build the graphic system, first place the sample to be tested on the standard reflector, use the computer to control the light source and the micro-mirror array DMD, encode the incident light with structured light, and control the detector CCD to move along the direction of the main light through a precise motion mechanism to obtain The position, angle and light intensity information of the incident light is used to complete the system calibrat...

Embodiment 3

[0051] see image 3 , a ray tracing surface shape three-dimensional measurement system of the present invention measures the surface shape and position information of two surfaces of a transmission sample, including a light source, a shaping and collimating lens, a micromirror array DMD, a TIR prism, a beam splitting prism, and a lens Group, sample to be tested, lens, detector CCD1 with precision motion mechanism and detector CCD2 with precision motion mechanism. Based on the ray tracing principle and light field representation method, the system obtains the surface shape and position information of the two surfaces of the transmission sample.

[0052] To build the graphic system, first place the sample to be tested on a standard parallel plate coated with semi-transparent and semi-reflective film, use the computer to control the light source and the micro-mirror array DMD, encode the incident light with structured light, and control the detector CCD1 through a precise motion ...

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Abstract

The invention discloses a three-dimensional surface measurement system for ray tracing, which includes a light source, a shaping and collimating lens, a microreflector array DMD, a TIR prism, a lens group, a sample to be tested, a lens, and a detector containing a precise motion mechanism CCD, the present invention has the following advantages: (1) the present invention adopts the micromirror array DMD device and the light source to accurately control the position of the incident light. (2) The present invention adopts a high-precision motion guide rail and a controller as the positioning of the detector. (3) The present invention is set by the scanning path of the incident light. (4) The present invention can measure various types of samples, including wavefront information of a transmission sample, surface shape and wavefront information of a reflection sample, and information between two surfaces of a transmission sample coated with a semi-transparent and semi-reflective film.

Description

technical field [0001] The invention relates to the technical field of high-precision measurement, in particular to a three-dimensional surface shape measurement system for ray tracing. Background technique [0002] The measurement of optical surfaces has become a key issue in the fields of aviation, aerospace, medical equipment, communication systems and micro-electromechanical systems. High-precision measurement is an important guarantee for the quality of optical surface processing. For optical components, the tolerance requirements of the measurement surface need to reach the order of microns or even nanometers. However, with the increasing complexity of the surface shape of optical elements, the current optical elements have expanded from traditional planar and spherical optical elements to optical aspheric surfaces and optical free-form surfaces. Especially for the currently widely used optical free-form surface, both its processing efficiency and production cost can...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
CPCG01B11/24
Inventor 高慧敏
Owner TIANJIN SINO GERMAN VOCATIONAL TECHNICAL COLLEGE
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