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Method and device for detecting wave plate surface phase delay amount

A technology of phase delay and detection method, which is applied in the field of optical detection, can solve the problems such as the inability to detect the phase delay of the wave plate plane, and achieve the effect of simple operation process and high measurement accuracy

Inactive Publication Date: 2018-11-06
NORTHWEST UNIV(CN)
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In view of the deficiencies in the prior art, the purpose of the present invention is to provide a detection method and device for the wave plate surface phase delay, to solve the problem that the detection method and device in the prior art cannot detect the surface phase delay of the entire wave plate

Method used

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  • Method and device for detecting wave plate surface phase delay amount
  • Method and device for detecting wave plate surface phase delay amount
  • Method and device for detecting wave plate surface phase delay amount

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Embodiment 1

[0034] The present embodiment provides a method for detecting the phase delay of the wave plate surface, which is used to detect the phase delay of each point on the surface of the wave plate 6 to be tested, including the following steps:

[0035] Using ZYGO interferometer 1 to generate plane light waves;

[0036] The plane light wave is first processed into a linearly polarized light wave, and the linearly polarized light wave is adjusted to a beam aperture to obtain a polarized light wave with a limited beam aperture, and the polarized light wave with a limited beam aperture is irradiated onto the wave plate 6 to be measured;

[0037] The wave plate 6 to be tested includes a first surface 6-1 and a second surface 6-2, adjusting the position of the ZYGO interferometer 1 and the wave plate 6 to be measured makes the reflected spot and plane of the first surface 6-1 The reflected light spots of the light waves coincide, and the positions of the ZYGO interferometer 1 and the wav...

Embodiment 2

[0040] On the basis of Example 1, such as figure 1 , 2 As shown, the required components of the method provided by Embodiment 1 include: ZYGO interferometer 1, computer 2, polarizer 4, adjustable diaphragm 5, wave plate to be measured 6 and five-dimensional adjustment frame 7, the computer 2 It is electrically connected with the ZYGO interferometer 1, and the ZYGO interferometer 1 is provided with a standard lens 3, and the standard lens 3 is used to generate a plane light wave, and a polarizer 4, an adjustable optical Diaphragm 5 and the wave plate 6 to be tested, wherein the wave plate 6 to be tested is fixed by a five-dimensional adjustment frame 7;

[0041] The five-dimensional adjustment frame 7 can adjust the wave plate 6 to be tested in five directions: X-axis, Y-axis, Z-axis, pitch angle α and tilt angle β, wherein the X-axis is the level of the plane perpendicular to the optical axis of the plane light wave direction, the Y axis is the vertical direction of the plan...

Embodiment 3

[0060] This embodiment provides a detection device for the phase delay of the wave plate surface, such as figure 1 ,include:

[0061] ZYGO interferometer 1, computer 2, polarizer 4, adjustable aperture 5, wave plate to be measured 6 and five-dimensional adjustment frame 7, the computer 2 is electrically connected to the ZYGO interferometer 1, and the ZYGO interferometer 1 is set There is a standard lens 3, and the standard lens 3 is used to generate a plane light wave, and a polarizer 4, an adjustable diaphragm 5, and a wave plate to be measured 6 are sequentially arranged along the propagation direction of the plane light wave, wherein the wave plate to be measured 6 passes through Five-dimensional adjustment frame 7 is fixed;

[0062] The five-dimensional adjustment frame 7 can adjust the wave plate 6 to be tested in five directions: X-axis, Y-axis, Z-axis, pitch angle α and tilt angle β, wherein the X-axis is the level of the plane perpendicular to the optical axis of the ...

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Abstract

The invention provides a method and device for detecting a wave plate surface phase delay amount, and the method and the device are used for detecting a phase delay amount of each point on the surfaceof a wave plate to be detected. The method comprises a step of generating a plane light wave by using a ZYGO interferometer, a step of processing the plane light wave into a linearly polarized lightwave, adjusting a beam diameter to obtain a polarized light wave of a limited light wave aperture and irradiating the polarized light wave of the limited light wave aperture to the wave plate to be detected, wherein the wave plate to be detected comprises a first surface and a second surface, and a step of adjusting the positions of the ZYGO interferometer and the wave plate to be detected such that a reflected light spot of the first surface and a reflected light spot of the plane light wave coincide, adjusting the positions of the ZYGO interferometer and the wave plate to be detected such that a reflected light spot of the second surface and the reflected light spot of the plane light wave coincide, and calculating the phase delay amount of each point in the first surface and the secondsurface of the wave plate to be detected. According to the method and device, the three-dimensional detection of a large-aperture wave plate surface phase delay amount is achieved, and a basis is provided for the wavefront analysis and compensation of a wide beam optical detection system using the wave plate.

Description

technical field [0001] The invention belongs to the field of optical detection, and in particular relates to a detection method and device for wave plate surface phase delay. Background technique [0002] The wave plate is an important optical device in the polarization optical system. It can change the polarization state of the incident light. It is widely used in optical precision instrument measurement, interference technology, photoelasticity, optical communication and many other fields. Phase retardation is one of the main parameters of the wave plate, and its measurement accuracy directly affects the polarization accuracy of the optical system. The diameter of the wave plate is usually 12.7mm and 25.4mm. The general wave plate phase delay detection method is only the average value measured for the laser beam diameter (about 5mm). The error of the wave plate phase delay within this caliber It is very small, so it can be ignored, but for many detection systems using pol...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/02
Inventor 张苏娟段存丽孙聃郑继明冯晓强
Owner NORTHWEST UNIV(CN)
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