Light-trapping transparent conductive glass for silicon-based thin film solar cell
A technology of transparent conductive glass and solar cells, applied in circuits, photovoltaic power generation, electrical components, etc., can solve problems affecting the performance of thin films, and achieve the effect of good crystal quality and good conductivity
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[0016] Example one
[0017] Such as figure 1 As shown, the present invention provides a light-trapping transparent conductive glass for silicon-based thin-film solar cells, comprising a glass substrate 1. The surface of the glass substrate 1 is sequentially laminated with a first AZO film 2, a second AZO film 3, and an Ag film 4 from bottom to top. And the third AZO film 5;
[0018] The glass substrate 1 adopts silicate glass with a thickness of 3.2mm, which can be hydroxylated to make the glass substrate 1 more hydrophilic;
[0019] The thickness of the first AZO film 2 is 100 nm, and Al in the first AZO film 2 2 O 3 The content of is 0.36at%; during preparation, an AZO target with an Al doping concentration of 0.5 wt% is used as a target, and the first AZO film 2 is sputtered and grown on the surface of the glass substrate 1 by the RF DC-coupled sputtering process; The transmittance of the first AZO film 2 is 90.8%, and the resistivity is 9.9*10 -1 Ω cm level;
[0020] The thicknes...
Example Embodiment
[0024] Example two
[0025] Such as figure 1 As shown, the present invention provides a light-trapping transparent conductive glass for silicon-based thin-film solar cells, comprising a glass substrate 1. The surface of the glass substrate 1 is sequentially laminated with a first AZO film 2, a second AZO film 3, and an Ag film 4 from bottom to top. And the third AZO film 5;
[0026] The glass substrate 1 adopts silicate glass with a thickness of 3.2mm, which can be hydroxylated to make the glass substrate 1 more hydrophilic;
[0027] The thickness of the first AZO film 2 is 110 nm, and Al in the first AZO film 2 2 O 3 The content of is 0.96at%; during preparation, an AZO target with an Al doping concentration of 1.0 wt% is used as a target, and the first AZO film 2 is sputtered and grown on the surface of the glass substrate 1 by the RF DC-coupled sputtering process; The transmittance of the first AZO film 2 is 90.2%, and the resistivity is 8.4*10 -1 Ω cm level;
[0028] The thicknes...
Example Embodiment
[0032] Example three
[0033] Such as figure 1 As shown, the present invention provides a light-trapping transparent conductive glass for silicon-based thin-film solar cells, comprising a glass substrate 1. The surface of the glass substrate 1 is sequentially laminated with a first AZO film 2, a second AZO film 3, and an Ag film 4 from bottom to top. And the third AZO film 5;
[0034] The glass substrate 1 adopts silicate glass with a thickness of 3.2mm, which can be hydroxylated to make the glass substrate 1 more hydrophilic;
[0035] The thickness of the first AZO film 2 is 120 nm, and the Al 2 O 3 The content of is 1.21at%; during preparation, an AZO target with an Al doping concentration of 1.5 wt% is used as a target, and the first AZO film 2 is sputtered and grown on the surface of the glass substrate 1 by the RF DC-coupled sputtering process; The transmittance of the first AZO film 2 is 89.7% and the resistivity is 9.3*10 -1 Ω cm level;
[0036] The thickness of the second AZO...
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