Welding waste gas treatment unit for semiconductor device manufacturing

A waste gas treatment device and semiconductor technology, which can be applied in combination devices, chemical instruments and methods, dispersed particle separation, etc., can solve problems such as polluting the atmosphere, affecting human health, and air pollution, and achieving stable and controllable airflow and good treatment effect. , to ensure the effect of stability

Pending Publication Date: 2018-11-23
SUZHOU GOODARK ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002] At present, semiconductor device companies often use automatic welding equipment. The main component of the flux used in welding equipment is rosin. Rosin will generate a large amount of waste gas after heating. If the waste gas is not collected and treated in a centralized manner, it will not only pollute the atmosphere, but also affect people. health
However, most of the current rosin factories simply collect the waste gas and discharge it directly into the atmosphere without any treatment, thus causing serious air pollution. How to overcome the above technical problems has become the direction of efforts of those skilled in the art

Method used

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  • Welding waste gas treatment unit for semiconductor device manufacturing

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Embodiment 1

[0023] Embodiment 1: A kind of welding waste gas treatment device for the manufacture of semiconductor devices, including ionization barrel 1, ionization rod 8, main sedimentation bottle 10 and air pump 15, one end of at least one air intake pipe 2 is connected to the said ionization barrel 1 On the side wall, the other end of the air inlet pipe 2 is used to be connected to the welding furnace 18, and the air inlet pipe 2 is provided with a temperature detector 3, a manual valve 4 and two flow detectors 5 all connected to the differential pressure sensor 6 , the manual valve 4 is located between two flow detectors 5;

[0024] The ionization rod 8 is embedded in the cavity of the ionization barrel 1, several ionization needles 9 are arranged around the outer wall of the ionization rod 8, and the main sedimentation bottle 10 is installed at the bottom of the ionization barrel 1;

[0025] The upper part of the ionization barrel 1 is connected to one end of the exhaust pipe 11, th...

Embodiment 2

[0027] Embodiment 2: A kind of welding waste gas treatment device for the manufacture of semiconductor devices, including ionization barrel 1, ionization bar 8, main sedimentation bottle 10 and air pump 15, one end of at least one air intake pipe 2 is connected to the said ionization barrel 1 On the side wall, the other end of the air inlet pipe 2 is used to be connected to the welding furnace 18, and the air inlet pipe 2 is provided with a temperature detector 3, a manual valve 4 and two flow detectors 5 all connected to the differential pressure sensor 6 , the manual valve 4 is located between two flow detectors 5;

[0028] The ionization rod 8 is embedded in the cavity of the ionization barrel 1, several ionization needles 9 are arranged around the outer wall of the ionization rod 8, and the main sedimentation bottle 10 is installed at the bottom of the ionization barrel 1;

[0029] The upper part of the ionization barrel 1 is connected to one end of the exhaust pipe 11, th...

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Abstract

The invention discloses a welding waste gas treatment unit for semiconductor device manufacturing. The welding waste gas treatment unit for semiconductor device manufacturing comprises an ionization bucket, an ionization rod, a main precipitating bottle and a sucking pump, wherein the side wall of the ionization bucket is provided with at least one inlet pipe; a thermodetector and a manual valve are arranged on the inlet pipe, and are both connected with the flow meter of a micro differential pressure sensor; the manual valve is located between 2 flow meters; the ionization rod is embedded into the cavity of the ionization bucket, and the ionization rod is provided with a plurality of ionization needles on the external wall; the main precipitating bottle is arranged on bottom of the ionization bucket; one end of the exhaust pipe is connected to the upper part of the ionization bucket, and another end of the exhaust pipe is connected to an auxiliary precipitating bottle; a escape pipe is connected to the exhaust pipe near the auxiliary precipitating bottle side, and the escape pipe is connected with the sucking pump; the welding waste gas treatment unit for semiconductor device manufacturing can effectively ionize and decompose the high-temperature exhaust gas produced from the welding furnace, and can more effectively process the rosin compositions in the high-temperature exhaust gas through the dual effect of the ionization bar and the air casing, so as to reduce environmental pollution caused by waste gas emission.

Description

technical field [0001] The invention relates to a welding waste gas treatment device for manufacturing semiconductor devices, and belongs to the technical field of waste gas discharge treatment. Background technique [0002] At present, semiconductor device companies often use automatic welding equipment. The main component of the flux used in welding equipment is rosin. Rosin will generate a large amount of waste gas after heating. If the waste gas is not collected and treated in a centralized manner, it will not only pollute the atmosphere, but also affect people. health. However, most of the current rosin factories simply collect the waste gas and discharge it directly into the atmosphere without any treatment, thus causing serious air pollution. How to overcome the above technical problems has become the direction of efforts of those skilled in the art. Contents of the invention [0003] The purpose of the present invention is to provide a welding waste gas treatment ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D50/00B01D53/00B01D53/32
CPCB01D50/00B01D53/002B01D53/323
Inventor 蒋伟金平
Owner SUZHOU GOODARK ELECTRONICS CO LTD
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