Air intake mode selectable vacuum furnace

Abstract

The invention discloses an air intake mode selectable vacuum furnace. The air intake mode selectable vacuum furnace comprises a furnace body. The furnace body is fixedly mounted on a mounting face through a bracket; furnace doors are movably connected to the front and back ends of the furnace body, separately; a plurality of outer air intake inlets are formed in the periphery of the furnace body;the outer air intake inlets are uniformly distributed around the furnace body; an outer air intake outlet is formed in the furnace body; an inner air intake inlet is formed in the top end of the furnace body; an inner air intake outlet is formed in the bottom end of the furnace body; an inner furnace body is arranged in the furnace body; a reaction chamber is arranged in the inner furnace body; and an interlayer is arranged between the inner furnace boy and the furnace body. By way of two air intake modes: inner air intake and outer air intake, the gas exchange efficiency is improved, different air intake and outtake modes can be replaced according to the processing demand, and the air intake mode selectable vacuum furnace is wider in adaptability. The pipelines at the air inlets and air outlets are simple in connecting mode and convenient to maintain.

Description

technical field [0001] The invention relates to the technical field of vacuum furnaces, in particular to a vacuum furnace with an optional air intake mode. Background technique [0002] Vacuum furnace, that is, in the specific space of the furnace cavity, a vacuum system (made up of vacuum pumps, vacuum measuring devices, vacuum valves and other components carefully assembled) is used to discharge part of the substances in the furnace cavity, so that the pressure in the furnace cavity is less than a standard atmospheric pressure , The space in the furnace cavity can realize vacuum state. The vacuum furnace is a device for heating in a vacuum environment. It is connected with a high vacuum pump system by a pipeline in a furnace sealed with a metal casing or a quartz glass cover. The vacuum degree of the furnace can reach 133×(10-2~10-4)Pa. The heating system in the furnace can be directly heated by electric resistance furnace wire (such as tungsten wire), or can be heated by...

AI Technical Summary

Problems solved by technology

The current vacuum furnace adopts a single gas inlet and outlet method, most of which are opened on the furnace body to connect the gas inlet and outlet of the reaction chamber, and the gas inlet and outlet methods cannot be flexibly adjusted according to actual needs, and the applicability is narrow

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