A pulsed Penning discharge plasma generator
A discharge plasma and plasma technology, applied in the direction of plasma, discharge tube, circuit, etc., can solve the problems of interfering with parallel magnetic field, affecting the orientation of plasma, and the plasma density distribution of discharge channel is not adjustable, etc., to achieve Avoid material melting and evaporation, reduce the effect of excessive requirements
Active Publication Date: 2020-01-17
DALIAN UNIV OF TECH
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Problems solved by technology
[0005] (2) The workpiece with magnetic permeability will interfere with the parallel magnetic field and affect the orientation of the plasma;
[0006] (3) The plasma density distribution of the discharge channel is not adjustable
Method used
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[0027] The present invention will be further described below in conjunction with the accompanying drawings, but the present invention is not limited thereto.
[0028] The pulse Penning discharge plasma generating device includes a plasma generating part 1, a workbench 2, an adjustable resistor 3, an adjustable resistor 4, a vacuum chamber 5, a vacuum system 6, a high-voltage pulse power supply 7 and a timing control circuit. 8. The plasma generating part 1 and the workbench 3 are installed in the vacuum chamber 2 independently.
[0029] The plasma generation part 1 is composed of a magnetic field coil 1-1, a circular support frame 1-2, a Penning anode 1-3, a cathode 1-4 and an auxiliary anode 1-5, and this part is installed inside the vacuum chamber 2. The magnetic field coil 1-1 is fixed on the outer circle of the annular support frame 1-2; the cathode 1-4 and the auxiliary anode 1-5 are relatively installed at the two ends of the inner hole of the annular support frame 1-2,...
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Abstract
The invention discloses a pulse Penning discharge plasma generating device, belonging to the field of material surface modification. The pulse Penning discharge plasma generating device comprises a plasma generating part, a vacuum chamber, a working table, a high-voltage pulse power supply, a timing sequence control circuit, an adjustable resistor one, an adjustable resistor two, and a vacuum system. After the vacuum chamber reaches a working pressure, the timing sequence control circuit is started; after the magnetic field strength reaches a set value, the space discharge is formed inside thePenning anode and the opposite section between the Penning anode and the cathode and the auxiliary anode, so as to obtain the discharge plasma; and the discharge plasma expands in the axial directionunder the constraint of the magnetic field, and acts on the surface of a workpiece after passing through the auxiliary anode. According to the invention, the plasma generating part and the workpieceare relatively independent, therefore, the influence of the workpiece on the plasma generation is negligible during the discharge plasma generation process; and the distribution density of the discharge plasma and the effect intensity of the discharge plasma on the workpiece are adjustable, therefore, the invention is suitable for surface modification of various materials.
Description
technical field [0001] The invention belongs to the field of material surface modification, and relates to a pulse Penning discharge plasma generating device. Background technique [0002] Among the existing material surface modification technologies, the material surface modification process realized by the plasma method has the advantages of high efficiency, energy saving and environmental protection. This technology has developed into the frontier field of material science. The common feature of these surface modification processes is the use of plasma discharge to generate active energy-carrying ions, and the energy, density distribution and trajectory of active energy-carrying ions can be controlled by electric and magnetic fields. When the plasma interacts with the surface of the workpiece, the element distribution, tissue morphology and physical and chemical changes in the energy action area of the material surface are triggered, and the material surface is modified...
Claims
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IPC IPC(8): H01J37/32H05H1/46
CPCH01J37/32009H01J37/32357H05H1/46
Inventor 郝胜智卢健胡方亭彭文海
Owner DALIAN UNIV OF TECH