Unlock instant, AI-driven research and patent intelligence for your innovation.

Mask plate, evaporation mask plate assembly and manufacturing method thereof, evaporation equipment

A mask plate and evaporation technology, which is applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problem of high cost of mold opening

Active Publication Date: 2020-07-21
BOE TECH GRP CO LTD +1
View PDF5 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, two masks need to be used, and the two masks need to be molded separately, and the cost of mold opening is high

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Mask plate, evaporation mask plate assembly and manufacturing method thereof, evaporation equipment
  • Mask plate, evaporation mask plate assembly and manufacturing method thereof, evaporation equipment
  • Mask plate, evaporation mask plate assembly and manufacturing method thereof, evaporation equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0028] The features and principles of the present invention will be described in detail below in conjunction with the accompanying drawings, and the examples given are only used to explain the present invention, not to limit the protection scope of the present invention.

[0029] Before describing the embodiments of the present invention in detail, it is necessary to describe the evaporation process of the evaporation mask in the prior art.

[0030] In the prior art, taking the hole transport layer and electron transport layer on the evaporated OLED display substrate as an example, a film thickness Teg opening is set at the peripheral area of ​​the evaporation mask of the hole transport layer, and the film thickness Teg opening can be In the process of evaporating the hole transport layer, a film thickness detection part for detecting the film thickness is formed at the peripheral area of ​​the OLED display substrate, and the display area of ​​the OLED display substrate can be ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a mask, an evaporated mask component, a manufacture method of the evaporated mask component and an evaporation apparatus. The mask is used for evaporating a display substrate and includes a mask body; the middle of the mask body is provided with a plurality of orifice portions corresponding to a display area of the display substrate; the peripheral area of the mask body is provided with film thickness detection orifices including a first film thickness detection orifice for detecting the thickness of a first film layer formed on the display substrate by evaporation, anda second film thickness detection orifice for detecting the thickness of a second film layer formed on the display substrate by evaporation. The mask, the evaporated mask component, the manufacture method of the evaporated mask component and the evaporation apparatus have the advantages that the mask is more universal and mold opening cost is reduced.

Description

technical field [0001] The invention relates to the technical field of display manufacturing, in particular to a mask plate, an evaporation mask plate assembly, a manufacturing method thereof, and an evaporation equipment. Background technique [0002] AMOLED (Active-matrix organic light emitting diode, active matrix organic light emitting diode or active matrix organic light emitting diode) display manufacturing methods include LTPS (Low Temperature Poly-silicon, low temperature polysilicon) backplane + evaporation mode, And the way of semiconductor oxide backplane + white organic light emitting diode (White Organic Light Emitting Diode, WOLE D) + color film. Among them, the former is mainly used in small-sized panels, corresponding to mobile phones and mobile applications; the latter is mainly used in large-sized panels, corresponding to applications such as monitors and TVs. [0003] Now the LTPS backplane + evaporation method has been preliminarily mature and mass produ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/04C23C14/24C23C14/54
CPCC23C14/042C23C14/24C23C14/545
Inventor 王倩楠袁鹏程
Owner BOE TECH GRP CO LTD