MEMS flexible manganin-constantan composite ultra-high pressure sensor and manufacturing method thereof

Abstract

The invention relates to an MEMS flexible manganin-constantan composite ultra-high pressure sensor and a manufacturing method thereof. The composite ultra-high pressure sensor comprises a substrate, wherein the substrate is sputtered with a manganin sensitive element, four first electrodes corresponding to the manganin sensitive element, a constantan sensitive element and four second electrodes corresponding to the constantan sensitive element, an input end and an output end of the manganin sensitive element are respectively connected with the two first electrodes, an input end and an output end of the constantan sensitive element are respectively connected with the two second electrodes, and the surfaces of the manganin sensitive element, the constantan sensitive element, the first electrodes and the second electrodes are covered with an insulating layer; and the manganin sensitive element and the constantan sensitive element adopt spiral centrosymmetric distribution, and both the substrate and the insulating layer adopt a polyimide material. The composite ultra-high pressure sensor has the characteristics of high precision, fast response, large output signal and the like.

Description

technical field [0001] The invention belongs to the technical field of ultra-high pressure sensors, and in particular relates to a MEMS flexible manganin-constantan composite ultra-high pressure sensor and a manufacturing method. Background technique [0002] Manganese copper is very suitable for making ultra-high pressure sensors due to its piezoresistive effect, high sensitivity, fast response, good linearity, and small temperature coefficient of resistance. It is currently the ultra-high pressure sensor with the highest upper limit of pressure measurement, and its effective range can reach tens of GPa. It is mainly used in defense fields such as the pressure measurement of weapons and ammunition explosion shock waves and explosive detonation waves. [0003] Most of the dynamic high-pressure flow fields are non-one-dimensional, so the manganese-copper ultra-high pressure sensor in it, in addition to the change of resistivity caused by pressure and then the change of resist...

AI Technical Summary

Problems solved by technology

Due to the influence of the insulating layer, it can be considered that manganese copper and constantan are deformed under different pressures, which makes it impossible to use the constantan sensor to eliminate the lateral stretch error in the manganese copper sensor, which will eventually lead to a certain measurement error

[0004] In addition, when it is necessary to measure the ultra-high pressure at a certain position on a curved surface, the existing ultra-high pressure sensor with a hard substrate (ceramic substrate or mica substrate) is not suitable

Although other flexible ultra-high pressure sensors can be used to measure the position of curved surfaces, due to their large size and thick thickness (about 0.1mm), they will affect the pressure flow field, resulting in certain measurement errors

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