Making method of infrared receiving pipe shielding layer for optoelectronic coupler
A photoelectric coupler and infrared receiving tube technology, applied in the direction of circuits, electrical components, semiconductor devices, etc., can solve the problem that the area, thickness, and shape of silicone rubber are difficult to maintain, and do not meet the prohibition (limitation) process requirements of spacecraft products, Problems such as the large transmission ratio of optocouplers are discrete, so as to reduce labor costs and processing time, improve long-term reliability, and improve quality consistency.
Inactive Publication Date: 2018-11-27
XIAN MICROELECTRONICS TECH INST
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Problems solved by technology
Based on the above reasons, the current silicone rubber coating on the surface of the die does not meet the technical requirements for the prohibition (limitation) of spacecraft products.
[0006] 2. The yield rate is low when assembling optocouplers with a specified transmission ratio
[0007] Due to the fluidity of silicone rubber, when dot-coating silicone rubber on the surface of the infrared receiving tube, it is difficult to keep the area, thickness, and shape of the silicone rubber consistent each time, which accordingly affects the dispersion of the transmission ratio of the photocoupler assembled with this infrared receiving tube. Big
Although for optocouplers with a large range of required transmission ratios, the discreteness of their transmission ratios has less impact; but for optocouplers that are required to produce a narrow range of transmission ratios, especially in the production of optoelectronics with specified transmission ratios When using a coupler, the discreteness of the transmission ratio will result in a very low single-batch yield, which in turn will cause a lot of waste of materials and manpower
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Embodiment 1
[0044] Step 1. On the infrared receiving tube that needs to make a shielding layer, use a sputtering process to make an aluminum shielding layer on the outer surface of the infrared receiving tube determined in step 1. The shielding areas are respectively 10%, 30%, 50% and 70%, and the shielding layer Use rectangular graphics (such as figure 2 ), the thickness of the aluminum shielding layer is 1.2 μm to 1.5 μm, and the silicon content is 1%wt silicon aluminum;
[0045] Step 2. Use the infrared receiving tube sample produced in step 1 to manufacture optocouplers according to the same process conditions. The same process conditions mean that the optocouplers assembled by this method should adopt the same assembly method, internal and external dimensions, and adopt the same process conditions. Infrared receiving tubes and infrared light-emitting tubes of various specifications; the transmission ratio of the final assembled photocoupler will not be affected by other variables ot...
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The invention discloses a making method of an infrared receiving pipe shielding layer for an optoelectronic coupler. The method comprises steps of making shielding layers with different light shielding area on the surface of a to-be-shielded infrared receiving pipe; using the to-be-shielded infrared receiving pipe to assemble an optoelectronic coupler so as to obtain a specific relation list between the area of the shielding layers on the surface of the infrared receiving pipe and the transmission ratio of the assembled optoelectronic coupler; and designing processing graphs and sizes of infrared receiving pipe surface light shielding films of corresponding transmission ratios, and processing aluminum shielding layers on the surface of the infrared receiving pipe so as to allow the optoelectronic coupler to reach the infrared receiving pipe with the corresponding transmission ratio. According to the invention, the light shielding graphs are controlled in a chip making stage, so precisecontrol of the light shielding area is achieved; discreteness of the distribution of the transmission ratio of the assembled optoelectronic ratio is small; the yield is greatly improved; a problem ofdifficulty in control of coating of silicone rubber is eliminated; labor and time are saved; and stability and reliability of products are improved.
Description
technical field [0001] The invention belongs to the technical field of integrated circuit manufacturing, and in particular relates to a method for manufacturing an infrared receiving tube shielding layer for a photocoupler. Background technique [0002] The optocoupler is a photoelectric device formed by encapsulating an infrared light-emitting tube and an infrared receiving tube in the same tube. The transfer ratio (CRT) of the optocoupler refers to the ratio of the secondary current to the primary current, and is one of the important parameters of the optocoupler. The adjustment method of the transmission ratio of a typical optocoupler is to rely on different methods of dispensing photoconductive glue on the infrared receiving tube, such as no glue on the back, only half the area of glue, partial reflection glue or full glue to achieve the transmission ratio. adjustment. [0003] However, the silicone rubber coating process on the surface of the die has the following s...
Claims
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IPC IPC(8): H01L31/18H01L31/0216
CPCH01L31/0216H01L31/18Y02P70/50
Inventor 何振山张丁
Owner XIAN MICROELECTRONICS TECH INST