An ultra-high precision pressure control device

Abstract

The invention discloses an ultrahigh-precision pressure control device. The ultrahigh-precision pressure control device comprises an oil tank, a power unit, a pressure regulating unit and a detectionand feedback unit; the power unit comprises a hydraulic pump and an electric motor connected with the hydraulic pump, and the pressure regulating unit comprises a proportional servo valve, a throttlevalve and a pilot-operated relief valve; the detection and feedback unit comprises a pressure sensor and a closed-loop controller; an oil outlet of a check valve, an oil inlet of the throttle valve and an oil inlet of the pilot-operated relief valve are in mutual communication; a port P of the proportional servo valve, the oil inlet of the throttle valve, an oil outlet of the throttle valve and adetection port of the pressure sensor are in mutual communication; the closed-loop controller is connected with a signal output port of the pressure sensor and the proportional servo valve; an oil suction port of the hydraulic pump, an oil outlet of the pilot-operated relief valve, the oil outlet of the throttle valve, and ports B and T of the proportional servo valve are communicated with the oiltank; a port A of the proportional servo valve is blocked. The ultrahigh-precision pressure control device has the advantage that ultrahigh-precision pressure control, in which the system pressure iswithin 1000kPa and the pressure fluctuation is less than 0.5kPa, is achieved.

Description

technical field [0001] The invention belongs to the technical field of hydraulic transmission, and in particular relates to an ultra-high-precision pressure control device for a hydraulic static pressure bearing. Background technique [0002] With the process of industrialization, the application field of hydraulic transmission technology is constantly expanding, and the requirements for hydraulic technology are getting higher and higher. Hydrostatic support bearings are the core components of ultra-precision machine tools, and small fluctuations in the supply pressure of the hydraulic system will directly Affecting the machining accuracy of the machine tool, it is necessary to control the supply pressure fluctuation of the hydraulic system within 0.5KPa at least. The pressure fluctuation accuracy is 5 / 10,000 of the supply pressure. According to literature search and market research, there is no technical solution and solution for this control accuracy. Mature product. Ther...

AI Technical Summary

Problems solved by technology

First of all, the variable displacement pump can only adjust the pressure at the outlet of the pump. Before the hydraulic oil is supplied to the actuator, it must pass through components such as pipelines, hydraulic valves, and filters. When passing through these components, there will be pressure losses. The adjustment accuracy of the hydraulic pump is affected; moreover, relatively speaking, the price of the variable pump is also relatively high, which increases the cost of equipment

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