Vertical cavity surface emitting laser based on metasurface and its fabrication method

Abstract

A vertical-cavity surface-emitting laser employing a metasurface structure, comprising: a lower broadband mirror (2), a gain medium (3), and an upper narrowband mirror (4) having a metasurface structure. A reflection spectrum of the broadband mirror, a light emission spectrum of the gain medium, and a narrowband reflection wavelength of the mirror having a metasurface structure overlap. The gain medium is first excited by a pump source, and then optical amplification of excited radiation light is achieved by a vertical resonance cavity consisting of the broadband mirror and the narrowband mirror having a metasurface structure, thereby realizing laser emission from a vertical cavity surface. Further disclosed is a manufacturing method, comprising: designing and fabricating a broadband mirror on a substrate material; designing a structure of a gain medium, and performing epitaxial growth thereof; designing and fabricating a narrowband mirror having a metasurface structure; and obtaining a vertical-cavity surface-emitting laser employing a metasurface structure. The vertical-cavity surface-emitting laser employing a metasurface structure of the invention has a simple and compact structure, is compatible with existing processes of semiconductor lasers, and has a simple manufacturing process, a single longitudinal mode, and superior stability.

Description

technical field [0001] The invention belongs to the field of micro-nano manufacturing of semiconductor laser devices, and more specifically relates to a vertical cavity surface emitting laser based on a metasurface structure and a manufacturing method thereof. Background technique [0002] In 1977, Professor Kenichi Tga and others first proposed the concept of vertical cavity surface-emitting laser (Vertical Cavity Surface-Emitting Laser, VCSEL), the main idea is to shorten the length of the cavity to obtain a single longitudinal mode output semiconductor laser, improve optical communication ability. VCSEL is a new type of semiconductor laser whose light is emitted from the direction perpendicular to the surface of the semiconductor substrate. Test, cheap and many other advantages. Since the early 1990s, the research on VCSEL has developed rapidly, and VCSELs used in different fields have been continuously developed. VCSELs with different wavelengths mainly include the dev...

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Problems solved by technology

[0003] Aiming at the above defects or improvement needs of the prior art, the present invention provides a vertical cavity surface emitting laser based on a metasurface structure and its manufacturing method, thereby solving the problem that traditional vertical cavity surface emitting lasers need to grow thick upper and lower layers. The Bragg mirror layer has technical problems such as complex preparation process, low light output power, and poor single-mode stability.

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