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Method for preparing lithium niobate micro-disk cavity with any polarization pattern in submicron period

A periodic polarization, lithium niobate technology, applied in instruments, nonlinear optics, optics, etc., can solve the problems of single pattern and large polarization period, and achieve the effect of simple operation and fixed-point operation.

Active Publication Date: 2018-12-21
NANKAI UNIV
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Problems solved by technology

The purpose of the technology of the present invention is to solve the technical problems of large polarization period and single pattern existing in the preparation of the periodically polarized microdisk cavity structure in the prior art, and to provide a method that can accurately prepare small period arbitrary polarization in the lithium niobate microdisk cavity. pattern method

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  • Method for preparing lithium niobate micro-disk cavity with any polarization pattern in submicron period
  • Method for preparing lithium niobate micro-disk cavity with any polarization pattern in submicron period
  • Method for preparing lithium niobate micro-disk cavity with any polarization pattern in submicron period

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Embodiment Construction

[0036] The technical details of the present invention will be clearly and completely described below in conjunction with the accompanying drawings and embodiments. Examples provide detailed implementation and specific operation process, but the present invention is not limited to the following examples.

[0037] According to the first technical solution of the present invention, a method for preparing a lithium niobate microdisk cavity with a submicron periodic arbitrary polarization pattern is provided, which includes the following steps:

[0038] Step 1, generating a lithium niobate thin film with a lower electrode;

[0039] Step 2, preparing a microdisk cavity mask pattern on the lithium niobate film;

[0040] Step 3, performing reactive ion beam etching on the sample to form a lithium niobate microdisk;

[0041] Step 4, constructing a polarization structure with any pattern on the lithium niobate microdisk;

[0042] Step five, etching the metal layer and the silicon dio...

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Abstract

The invention provides a method for preparing a lithium niobate micro-disk cavity with any polarization pattern in a submicron period. The method comprises the following steps of step 1, generating alithium niobate thin film with a lower electrode; step 2, preparing a micro-disk cavity mask pattern on the lithium niobate thin film; 3, carrying out reactive ion beam etching on a sample to form a lithium niobate micro-disk; step 4, constructing a polarization structure of any pattern on the lithium niobate micro-disk; and step 5, performing etching on a metal layer and a silicon dioxide layer on the sample to form a periodically-polarized lithium niobate micro-disk cavity with suspended edges. The method is simple to operate and high in precision, and can be used for preparing ferroelectriccrystal microcavity with any polarization pattern with a small period.

Description

technical field [0001] The invention relates to the preparation of a periodically polarized microdisk cavity structure, in particular to a method for preparing a lithium niobate microdisk cavity with a submicron periodic arbitrary polarization pattern, which is suitable for ferroelectric crystal materials represented by lithium niobate. Background technique [0002] Lithium niobate crystal is called "optical silicon" because of its excellent electro-optic, acousto-optic and nonlinear optical properties. have important applications. The nonlinear effect of lithium niobate crystal is one of the widely used properties of lithium niobate crystal. Under the condition that the complete phase matching condition is difficult to meet, the lithium niobate crystal domain engineering based on the quasi-phase-matching (QPM) technology periodically changes the polarization direction of the lithium niobate crystal, that is, the The sign of the nonlinear coefficient is used to make up for...

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Application Information

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IPC IPC(8): G02F1/05
CPCG02F1/05
Inventor 薄方张莉郝振中高峰张国权许京军
Owner NANKAI UNIV
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