A Bubble-Driven Valveless Micropump Using a Continuous Heat Source

Abstract

The invention discloses a bubble-driven valveless micropump capable of using a continuous heat source, and belongs to the technical field of pumping equipment. The bubble-driven valveless micropump capable of using the continuous heat source comprises a pump cavity and a microchannel which are etched in a silicon wafer. The inlet end and the outlet end of the pump cavity are separately provided with a conical inlet pipe and a conical outlet pipe. The large-diameter end of the conical inlet pipe is connected with the pump cavity. The small-diameter end of the conical outlet pipe is connected with the pump cavity. The large-diameter end of the conical outlet pipe communicates with the microchannel. The pump cavity and the microchannel are filled with fluid. A bubble communicating with an external heater is arranged in the pump cavity. The pump cavity communicates with the microchannel through a micro gas guide pipe. The micro gas guide pipe is spaced from the bubble. The external heaterintermittently delivers gas into the bubble. The bubble-driven valveless micropump capable of using the continuous heat source is simple and compact in structure, convenient to carry and easy to machine, and microminiaturization and integration of the bubble-driven valveless micropump can be achieved easily; part of gas in the bubble is guided out through the micro gas guide pipe, and the size ofthe bubble is increased, decreased and increased repeatedly under the effect of hot gas continuously or intermittently delivered into the bubble by the external heater, so that continuous adjustment of bubble driving is achieved; and meanwhile, the driving frequency of the micropump is greatly improved.

Description

technical field [0001] The invention belongs to the technical field of pumping equipment, and in particular relates to a valveless micropump driven by air bubbles that can utilize a continuous heat source. Background technique [0002] As the "heart" of the microfluidic system, the micropump is the power source of microfluidic transportation and an important symbol of the development level of the microfluidic system. As an important micro-actuating component, micro-pumps can also be widely used in drug delivery, blood transport, DNA synthesis, electronic cooling systems, micro-total analysis systems, micro-fuel cells, micro-satellite propulsion systems, etc., with huge market applications prospect. [0003] Microfluidic drive and control technology is one of the key technologies of microelectromechanical systems (MEMS), and it is widely used in various occasions involving microfluidic transportation. In the field of electronics market, usually chips have a considerable hea...

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Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide a bubble-driven valveless micropump that can utilize a continuous heat source. ; while the valved micropump has a complex structure and high processing technology, which is not conducive to the technical problems of miniaturization and integration

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