A device and method for measuring the inclination angle of a square hole channel of a lobster eye lens

Abstract

The invention discloses a device and a method for measuring the dip angle of a square hole channel of a lobster eye lens. The method comprises the following steps: first, adjusting an X-ray light source, an MPO lens and an SDD detector to a coaxial optical system through a six-dimensional precision device table and a laser generator; second, constraining an X-ray beam emitted by an X-ray light pipe to a quasi parallel X-ray beam through a diaphragm A and a diaphragm B to be irradiated to the MPO lens; then adjusting the state of the MPO lens through the six-dimensional precision device table to maximize the count of the SDD detector, wherein the dip angle of the square hole channel of the MPO lens is the rotating angle of the precision table at the moment; and scanning the position of theMPO in a two-dimensional manner to record the dip angles of the square hole channel of the MPO lens in different positions. The device and method are simple to operate and high in measuring precision,and can detect the dip angle of the MPO lens quickly to acquire dip angle information of the channels in different positions accurately, so that a process is guided favorably and the quality problemis found favorably.

Description

technical field [0001] The invention relates to the field of X-ray detection and imaging, in particular to a device and method for measuring the inclination angle of a square hole channel of a lobster eye lens. Background technique [0002] In 1979, Angle proposed for the first time to develop a lobster-eye X-ray astronomical telescope based on a square array structure based on the lobster-eye structure. However, limited by the manufacturing technology and processing level at that time, it was not until the 1990s, with the maturity of a new type of micro-pore optical system (Micro-pore optic, MPO), that the LE system was realized and promoted. In 2004, Libor Sveda et al. designed a model of the lobster eye device, and simulated and demonstrated the feasibility of the lobster eye telescope in space. In 2005, NASA and DARPA jointly developed the Lobster-ISS telescope (including 6 Angle-type spherical square hole MPO mirrors). In 2009, ESA and the University of Leicester join...

AI Technical Summary

Problems solved by technology

However, limited by the geometric parameters of the MPO lens, conventional optical detection methods will produce interference and diffraction phenomena and cannot be used

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