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A mask, a display substrate, and a method of manufacturing that same

A technology of display substrate and mask, which is applied in mask, display substrate and its production field, can solve the problem that the film pattern is prone to crater shape and the like

Active Publication Date: 2019-01-15
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] In view of this, the present invention provides a mask, a display substrate and a manufacturing method thereof, which are used to solve the problem that craters are prone to appear in the film pattern formed by using the current mask

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  • A mask, a display substrate, and a method of manufacturing that same
  • A mask, a display substrate, and a method of manufacturing that same
  • A mask, a display substrate, and a method of manufacturing that same

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Embodiment Construction

[0040] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention more clear, the following will clearly and completely describe the technical solutions of the embodiments of the present invention in conjunction with the drawings of the embodiments of the present invention. Apparently, the described embodiments are some, not all, embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention belong to the protection scope of the present invention.

[0041] Please refer to Figure 5 , Figure 5 It is a schematic structural diagram of a mask plate according to an embodiment of the present invention, the mask plate includes: a transparent substrate 10, and a light-shielding layer 20 disposed on the transparent substrate 10, and the light-shielding layer 20 has a first Opening pattern 21; The transparent substrate 10 includes: a first re...

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Abstract

The invention provides a mask, a display substrate and a manufacturing method thereof. The mask comprises a transparent substrate and a light shielding layer arranged on the transparent substrate, wherein the light shielding layer is provided with a first opening pattern. The transparent substrate comprises: a first region in which an orthographic projection of the first region on the light shielding layer overlaps the first opening pattern, and at least a portion of an edge region of the first region has a light converging structure for converging light incident on the at least a portion of the edge region toward a central region of the first opening pattern. In the present invention, by providing a light converging structure in the edge region of the opening of the mask, the light incident on the edge region of the opening can be converged toward the center region of the opening, the light intensity lacking in the center region can be compensated, and the film pattern of the volcaniccrater shape can be avoided.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a mask plate, a display substrate and a manufacturing method thereof. Background technique [0002] Thin film transistor liquid crystal display (TFT-LCD) has become the mainstream of the market due to its many advantages such as high image quality, high space utilization, low power consumption, and no radiation. In the liquid crystal display panel, the color filter substrate and the array substrate are arranged opposite to each other to form a liquid crystal cell. To ensure the uniformity of the cell thickness of the liquid crystal cell, a spacer (Photo Spacer, PS) plays an important role. [0003] At present, when a half-tone mask is used to make a spacer, the light transmittance at the opening of the half-tone mask has a definite value. When the exposure gap (Gap) is constant ( figure 1 middle gap=200μm), the light intensity distribution through different Half-Tone Mask open...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F1/38G02F1/13G02F1/1339
CPCG02F1/1303G02F1/1339G03F1/38G03F1/50G03F1/60G02F1/13394
Inventor 肖宇李景阳张国华汪栋宋勇志
Owner BOE TECH GRP CO LTD
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