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Mask plate, display substrate and manufacturing method thereof

A technology for display substrates and masks, which is applied in the field of display substrates and their production and masks, and can solve the problems of easy crater morphology in film graphics

Active Publication Date: 2022-01-18
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] In view of this, the present invention provides a mask, a display substrate and a manufacturing method thereof, which are used to solve the problem that craters are prone to appear in the film pattern formed by using the current mask

Method used

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  • Mask plate, display substrate and manufacturing method thereof
  • Mask plate, display substrate and manufacturing method thereof
  • Mask plate, display substrate and manufacturing method thereof

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Embodiment Construction

[0040] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention more clear, the following will clearly and completely describe the technical solutions of the embodiments of the present invention in conjunction with the drawings of the embodiments of the present invention. Apparently, the described embodiments are some, not all, embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention belong to the protection scope of the present invention.

[0041] Please refer to Figure 5 , Figure 5 It is a schematic structural diagram of a mask plate according to an embodiment of the present invention, the mask plate includes: a transparent substrate 10, and a light-shielding layer 20 disposed on the transparent substrate 10, and the light-shielding layer 20 has a first Opening pattern 21; The transparent substrate 10 includes: a first re...

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Abstract

The present invention provides a mask plate, a display substrate and a manufacturing method thereof. The mask plate comprises: a transparent substrate and a light-shielding layer arranged on the transparent substrate, and the light-shielding layer has a first pattern of openings; The transparent substrate includes: a first region, the orthographic projection of the first region on the light-shielding layer overlaps with the first opening pattern, at least part of the edge region of the first region has a light-gathering structure, the The light converging structure is used for converging the light incident on the at least part of the edge region to the central region of the first opening pattern. In the present invention, by setting the light converging structure in the edge area of ​​the opening of the mask, the light incident on the edge area of ​​the opening can be converged to the central area of ​​the opening, compensating for the lack of light intensity in the central area, and avoiding the formation of crater topography film graphics.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a mask plate, a display substrate and a manufacturing method thereof. Background technique [0002] Thin film transistor liquid crystal display (TFT-LCD) has become the mainstream of the market due to its many advantages such as high image quality, high space utilization, low power consumption, and no radiation. In the liquid crystal display panel, the color filter substrate and the array substrate are arranged opposite to each other to form a liquid crystal cell. To ensure the uniformity of the cell thickness of the liquid crystal cell, a spacer (Photo Spacer, PS) plays an important role. [0003] At present, when a half-tone mask is used to make a spacer, the light transmittance at the opening of the half-tone mask has a definite value. When the exposure gap (Gap) is constant ( figure 1 middle gap=200μm), the light intensity distribution through different Half-Tone Mask open...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F1/38G02F1/13G02F1/1339
CPCG02F1/1303G02F1/1339G03F1/38G03F1/50G03F1/60G02F1/13394
Inventor 肖宇李景阳张国华汪栋宋勇志
Owner BOE TECH GRP CO LTD
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