A DBR structure plate on that back of a blue LED chip and a preparation method thereof
A LED chip and back-plating technology, which is applied in the direction of electrical components, circuits, semiconductor devices, etc., can solve problems such as color difference, shedding, and shorten the evaporation process time, so as to simplify the film structure, balance production efficiency, and shorten the evaporation process. The effect of process time
Inactive Publication Date: 2019-01-15
SUZHOU NANOJOIN PHOTONICS
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Problems solved by technology
The DBR few-layer structured film system can not only meet the basic requirements of blue LED chips on the reflectivity and reflection bandwidth of the back-plated structure, but also greatly shorten the evaporation process time, but the few-layer structured film system has a narrow bandwidth, and after evaporation Inevitably, there will be some chromatic aberration problems caused by bandwidth drift. In addition, if the film thickness is too thin, there will also be some film quality instability factors, such as easy to be punctured by sorting thimbles and back plating peeling off, etc.
The multi-layer irregular film system can basically cover the entire visible light band, and can effectively improve the requirements of white light packaging for full-band reflectivity and reflection bandwidth, but too many film layers greatly affect the production efficiency
Method used
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[0017] The technical solution of the present invention will be described in detail below in conjunction with the examples. The present invention discloses a back-coated DBR film structure of a blue LED chip. Similar to the prior art, the DBR film structure is back-plated on the back of the LED chip. Different from the prior art, the DBR film system has 20 layers, and the DBR film system is an irregular film system, and each layer of the DBR film system has a different corresponding center wavelength. The DBR film is made of SiO 2 、TiO 2 The two materials are alternately stacked, and the optical thickness of each layer of alternately grown materials is a quarter of the central wavelength of the corresponding film system. The total thickness of the finally formed DBR film system is about 1600nm.
[0018] The preparation method of a kind of blue light LED chip back-plated DBR film system structure described above comprises the following steps,
[0019] S1. Prepare the substrat...
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Abstract
The invention provides a DBR film system structure on the back of a blue LED chip, wherein the DBR film system structure is evaporated on the back of the LED chip, the DBR film system is 20 layers, the DBR film system is an irregular film system, and each DBR film system has different corresponding central wavelength. The invention has the advantages of widening the reflection bandwidth of the regular film system, simplifying the whole-band irregular DBR film system structure and shortening the evaporation process time. It not only meets the requirement of reflectivity of Blu-ray chip, but also balances the production efficiency effectively.
Description
technical field [0001] The invention belongs to the technical field of semiconductors, and in particular relates to a back-plated DBR structure of a blue LED chip and a preparation method thereof. Background technique [0002] DBR is an optical multi-layer structure evaporated on the back of the LED chip, and its photon-like characteristics can reach more than 99% reflection characteristics, which can effectively improve the luminous brightness of the LED. The DBR few-layer structured film system can not only meet the basic requirements of blue LED chips on the reflectivity and reflection bandwidth of the back-plated structure, but also greatly shorten the evaporation process time, but the few-layer structured film system has a narrow bandwidth, and after evaporation Inevitably, there will be some chromatic aberration problems caused by bandwidth drift. In addition, if the film thickness is too thin, there will also be some film quality instability factors, such as easy to b...
Claims
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Patent Timeline
Login to View More IPC IPC(8): H01L33/46
CPCH01L33/46H01L2933/0025
Inventor 吴冬雪王怀兵王辉
Owner SUZHOU NANOJOIN PHOTONICS