Simulation method for double-base disk type involute sample plate measurement optical system based on heterodyne interference
An optical system, heterodyne interference technology, applied in the field of ZEMAX simulation, can solve the problems affecting system measurement accuracy, optical component placement error, non-ideal optical components, etc., to achieve the effect of optical system model optimization
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[0044] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. figure 2 It is a flow chart of system simulation using ZEMAX software, and its specific implementation process and result analysis process are as follows:
[0045] Step 1: Set the double-base disc involute model for laser heterodyne interference with three optical paths to measure the optical system parameters with high precision, namely wavelength and aperture. According to the system requirements, the frequencies are selected as f 1 and f 2 , The aperture of the light is selected as 20mm.
[0046] Step 2: Modeling in ZEMAX using non-sequential and sequential ray tracing modes to realize the first beam splitter BS 1 modeling simulation. Enter parameters in the data editing column in ZEMAX: BS 1 The radius of curvature, thickness and glass material. In non-sequential mode, model building of the geometry is done. Set the film lay...
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