A solar cell sheet preparation process and a process control system

Abstract

The invention discloses a solar cell sheet preparation process and a process control system, and relates to the technical field of solar cell sheet preparation. A manufacture method of that inventioncomprises the follow steps in turn: velvet making, low-voltage diffusion, etching, PECVD, back electrode printing, back electric field printing, positive electrode printing, sintering and test sorting; the process control system includes a main controller, an air supply system, a temperature control system and a pressure control system; The main controller is respectively connected with an air supply system, a temperature control system and a pressure control system. The solar cell sheet prepared by the low-pressure diffusion process has good diffusion uniformity, high conversion efficiency and low cost. At the same time, through the process control system of the invention, the whole process of the low-pressure diffusion process is convenient to be controlled, and the P-N junction diffusion is easily performed in a stable furnance condition.

Description

technical field [0001] The invention belongs to the technical field of solar cell preparation, and in particular relates to a solar cell preparation process and a solar cell preparation process control system. Background technique [0002] Diffusion of solar cells is a process of making silicon wafers of solar cells: P-N junction diffusion, diffusion process: put silicon wafers into a high-temperature diffusion furnace, pass through gases such as nitrogen and POCL3, and form P-N on the surface of silicon wafers after decomposition at high temperature Junction, the purpose of its diffusion junction (p-n junction): On the surface of P-type silicon, it is formed by diffusing P atoms. [0003] With the continuous advancement of technology, crystalline silicon solar cells are gradually becoming large-scale, ultra-thin, higher production capacity (single tube ≥ 800Pcs), lower surface impurity concentration (surface square resistance 70-140Ohm), better square resistance uniformity ...

AI Technical Summary

Problems solved by technology

[0003] With the continuous advancement of technology, crystalline silicon solar cells are gradually becoming large-scale, ultra-thin, higher production capacity (single tube ≥ 800Pcs), lower surface impurity concentration (surface square resistance 70-140Ohm), better square resistance uniformity Uniformity (uniformity within 4%) and the development of higher energy efficiency ratio, the traditional closed-tube atmospheric pressure diffusion furnace can no longer meet the requirements, these requirements will bring further challenges to the new diffusion technology and equipment manufacturing level

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