Device and method for detecting defects of large-diameter plane mirror based on line scanning and ring belt splicing

Abstract

The invention discloses a device and a method for detecting defects of a large-diameter plane mirror based on line scanning and ring belt splicing. The device comprises a line scanning detector, an annular illumination light source, a measured plane mirror, a rotary table around the Z-axis, a translation table along the X-axis and a computer. By translating and rotating the measured plane mirror,the surface of the whole measured plane mirror can be detected by the scanning detector; the defect condition of the whole measured plane mirror is obtained through an ring belt splicing method; and the line scanning and the ring belt splicing reduces the imaging distortion, the intermediate data volume, and the correction difficulty and the splicing difficulty of distortions, thereby improving the detection speed and the detection quality.

Description

technical field [0001] The invention belongs to the field of optical detection, and in particular relates to a defect detection device and method for a large-diameter flat mirror based on line scanning and ring splicing. Background technique [0002] The lithography lens is a complex optical system composed of dozens of lenses, some of which have large apertures, and it is difficult to develop corresponding standard lenses. Stitching measurement plans a mirror surface into multiple small sub-apertures, and measures each sub-aperture one by one, and then combines the surface shape of the sub-apertures into the surface shape of the entire mirror surface through an algorithm. At the beginning of the 21st century, the American QED company produced the SSI automatic splicing interferometer to realize the automatic splicing measurement of optical components, but the detection accuracy is low, and it is only used as a process detection instrument in high-precision lens processing. ...

AI Technical Summary

Problems solved by technology

At the beginning of the 21st century, the American QED company produced the SSI automatic splicing interferometer to realize the automatic splicing measurement of optical components, but the detection accuracy is low, and it is only used as a process detection instrument in high-precision lens processing

At present, the existing surface flaw detection device is mainly based on area array camera scanning. The disadvantages are that there are many sub-apertures, long detection time, large amount of intermediate data, large distortion of sub-aperture data imaging, and difficult distortion correction and position correction during splicing.

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