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Preparation method of wear-resisting diamond-like coating applied to low-temperature material

A technology of diamond coating and low-temperature materials, which is applied in the direction of metal material coating process, coating, ion implantation plating, etc., can solve the problems such as poor deposition of thin films, and achieve the goal of improving product quality, low friction coefficient, and increasing production capacity Effect

Pending Publication Date: 2019-02-22
NANOFILM VACUUM COATING SHANGHAI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Vacuum coating generally requires a certain high temperature to be carried out, and due to the high hardness of the diamond-like film, the film cannot be well deposited on plastic and other substrates.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] Simple film preparation example:

[0029] a. Substrate preparation: PC transparent plastic, cleaned with industrial cleaning agent (ultrasonic cleaning), then rinsed with pure water, then dried, and baked in a 70°C oven for 12 hours;

[0030] b. Clamp the prepared substrate and put it into the prepared TAC coating chamber;

[0031] c. Evacuate to the set vacuum degree (generally set to 5.0E-5Torr);

[0032] d. Perform ion cleaning and ion etching on the surface of the product to obtain better adhesion;

[0033] e. Bottom coating: use unipolar pulse magnetron sputtering to deposit a metal layer, the target material is Cr, and the film thickness is 1.0um;

[0034] f. TAC layer coating: use FCVA coating technology to deposit TAC layer, the target material is graphite, and the film thickness is 1.2um.

Embodiment 2

[0036] Performance test results: The quality of the film layer is usually judged by the 100-grid test, nano-hardness test, and rubber friction test.

[0037] a. Hundred-grid test: use a hundred-grid knife and 3M610 adhesive tape. Test result: no film peeling off, judgment 5B.

[0038] b. Nanohardness: using Anton Paar nanoindenter with a load of 4mN. Test result: Nanohardness 2520HV.

[0039] c. Rubber friction test: use Taber5750 rubber testing machine, CS-10 rubber, load 1kg, stroke 1 inch. Test results: 200 times without obvious scratches.

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Abstract

The invention relates to the technical field of film coating, in particular to a preparation method of a wear-resisting diamond-like coating applied to a low-temperature material. The preparation method of the wear-resisting diamond-like coating applied to the low-temperature material comprises a base material, a metal bottom layer and a TAC thin film layer, and is characterized by comprising thefollowing specific steps that S1, the surface of the base material is plated with the electric conduction metal bottom layer through the monopole pulse magnetron sputtering film coating technology; and S2, the surface of the metal bottom layer is plated with the high-wear-resistance TAC thin film layer through the FCVA film coating technology. Compared with the prior art, the FCVA technology underthe normal temperature is adopted, the non-high-temperature-resisting base material is coated with the diamond-like coating, and high wear resistance is achieved. Through the FCVA technology, deposition can be achieved under the room temperature, the advantages of high wear resistance and the like can be achieved, and therefore the method is applied to non-high-temperature-resisting products, andproduct wear resistance can be greatly improved.

Description

technical field [0001] The invention relates to the technical field of coating, in particular to a method for preparing a wear-resistant diamond-like coating applied to low-temperature materials. Background technique [0002] Vacuum coating is an important aspect in the field of vacuum applications. It is based on vacuum technology, uses physical or chemical methods, and absorbs a series of new technologies such as electron beams, molecular beams, ion beams, plasma beams, radio frequency and magnetron. Scientific research and practical production provide a new process for thin film preparation. Simply put, the method of evaporating or sputtering metals, alloys or compounds in a vacuum to solidify and deposit them on the coated object (called substrate, substrate or substrate) is called vacuum coating. [0003] As we all know, on the surface of some materials, as long as a layer of film is coated, the material can have many new and good physical and chemical properties. Vac...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/02C23C14/06C23C14/20C23C14/32C23C14/35
CPCC23C14/025C23C14/0605C23C14/205C23C14/325C23C14/35
Inventor 史旭唐智
Owner NANOFILM VACUUM COATING SHANGHAI