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A film layer analysis method of electroluminescence device

An electroluminescent device and analysis method technology, which is applied in the direction of electric solid-state devices, material analysis and material analysis by electromagnetic means, can solve the problem of incomplete stripping of the cathode layer and the luminescent material layer, and achieve a stable and controllable stripping process. Avoid the peeling effect

Active Publication Date: 2020-06-09
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] When the cathode layer is peeled off by blade or adhesive tape, it is easy to cause incomplete peeling of the cathode layer or partial peeling of the electroluminescent material layer

Method used

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  • A film layer analysis method of electroluminescence device
  • A film layer analysis method of electroluminescence device
  • A film layer analysis method of electroluminescence device

Examples

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Embodiment Construction

[0041] In order to make the technical solutions and advantages of the present invention clearer, the embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0042] When analyzing the film layer of an electroluminescent device in the prior art, when the cathode layer needs to be peeled off by a blade or an adhesive tape, the technical problem that the cathode layer is not completely peeled off or the electroluminescent material layer is partially peeled off easily occurs, the present invention implements The example provides a film layer analysis method of an electroluminescent device, which can effectively and completely remove the silver-containing cathode layer without affecting the electroluminescent material layer.

[0043] The electroluminescent device involved in the embodiment of the present invention includes: an anode layer, an electroluminescent material layer, and a silver-containing cathode laye...

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Abstract

The invention discloses a film layer analysis method of an electroluminescence device, wherein the electroluminescence device comprises: an anode layer, an electroluminescence material layer and a silver-containing cathode layer stacked in sequence. The film analysis method includes: providing a mass spectrometer with an ion sputtering source and a gas cluster ion source; using the ion sputtering source to peel off the silver-containing cathode layer from the electroluminescent device to obtain an analysis of the exposed electroluminescent material layer Sample; analysis of the exposed electroluminescent material layer using a gas cluster ion source. The silver-containing cathode layer is sputtered and stripped by using an ion sputtering source, the stripping process is stable and controllable, the silver-containing cathode layer can be effectively and thoroughly removed, and the stripping of the electroluminescent material layer is avoided. Using the gas cluster ion source to analyze the exposed electroluminescent material layer can not only obtain the composition and position of each film layer of the electroluminescent material layer, but will not cause damage to the electroluminescent material layer.

Description

technical field [0001] The invention relates to the field of organic analysis, in particular to a film layer analysis method of an electroluminescence device. Background technique [0002] Electroluminescent devices are widely used due to their advantages of active light emission, wide visible range, and fast response. The electroluminescence device includes: an anode layer, an electroluminescence material layer, and a cathode layer stacked in sequence. Wherein, the electroluminescent material layer may be of various types, for example, may include: a hole transport layer, an organic light-emitting layer, an electron transport layer, etc. stacked in sequence along the direction from the anode layer to the cathode layer. [0003] The electroluminescent material layer has a direct impact on the luminescent performance of the electroluminescent device, so mass spectrometers are currently used to analyze the composition of each film layer of the electroluminescent material laye...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/62H01L51/50
CPCG01N27/62H10K50/11H10K50/00H01J49/142H01J49/40
Inventor 刘莹彭于航杜聪聪范磊范春芳吴启薛孝忠秦浩然
Owner BOE TECH GRP CO LTD
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