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High-precision vibration-resistant Pirani vacuum sensor

A vacuum sensor and temperature sensor technology, applied in vacuum gauges, instruments, measuring devices, etc., can solve the problems of low measurement accuracy, low stability and anti-vibration, and achieve high measurement accuracy, stable filament temperature, and improved measurement resolution. rate effect

Inactive Publication Date: 2019-03-05
润桐(苏州)技术服务有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The technical problem to be solved by the present invention is the problems of low measurement accuracy, low stability and low vibration resistance existing in the prior art

Method used

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  • High-precision vibration-resistant Pirani vacuum sensor
  • High-precision vibration-resistant Pirani vacuum sensor
  • High-precision vibration-resistant Pirani vacuum sensor

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Embodiment 1

[0036] This embodiment provides a high-precision anti-seismic Pirani vacuum sensor, the high-precision anti-seismic Pirani vacuum sensor includes a temperature sensing module and a control module, the temperature sensing module includes a metal shell, and the metal shell is provided with a vacuum chamber, a temperature sensing device is provided in the vacuum chamber, and a control conversion circuit connected to the induction device, the control conversion circuit includes a signal amplification circuit and an AD conversion circuit; the control module includes a micro-processing unit connected to the control conversion circuit, and The display module to which the processing unit is connected. Such as image 3 , the temperature sensing device includes 3 temperature sensing units, through the parallel connection of the first temperature sensing unit and the second temperature sensing unit, the structure of the third temperature sensing unit connected in series with the first te...

Embodiment 2

[0047] On the basis of Embodiment 1, this embodiment further optimizes usage scenarios. In this embodiment, one control module corresponds to multiple temperature sensing modules, which can improve the utilization rate of the control modules, thereby reducing costs.

[0048] Such as Image 6 , the control module and the temperature-sensing module are connected by a signal cable, and the one control module corresponds to N temperature-sensing modules; wherein N is a positive integer.

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Abstract

The invention relates to a high-precision vibration-resistant Pirani vacuum sensor, which mainly solves the technical problems of low measurement accuracy, low stability and low vibration resistance existing in the prior art. The high-precision vibration-resistant Pirani vacuum sensor solves the problems by adopting a technical scheme that a temperature sensing device includes a sensitive elementunit, the sensitive element unit is of a spiral filament structure, the spiral filament structure includes four layers of spiral bodies, the first layer of spiral body is a spiral body formed by spirally winding an auxiliary tungsten filament around a first main tungsten filament, the second layer of spiral body is a spiral body formed by spirally winding the first layer of spiral body around a second main tungsten filament, the third layer of spiral body is a spiral body formed by spirally winding the second layer of spiral body, and the fourth layer of spiral body is a spiral body formed byspirally winding the third layer of spiral body; and the tungsten filaments are spirally twin-twisted tungsten filament combinations. The high-precision vibration-resistant Pirani vacuum sensor can beapplied to industrial production of vacuum sensors.

Description

technical field [0001] The invention relates to a vacuum sensor, in particular to a high-precision shock-resistant Pirani vacuum sensor. Background technique [0002] The development of vacuum technology has a history of more than one hundred years, and it is gradually playing an increasingly important role in the fields of industrial and scientific research applications. Vacuum refers to taking out the gas molecules inside a closed cavity never creating a very clean negative pressure environment. Due to the existence of such a large number of gas molecules and various particulate matter in the atmosphere, many researches and processes cannot be carried out. Because the vacuum environment removes gas molecules and various particles in the atmosphere, its negative pressure characteristics also change the various pollutants adsorbed on the surface of the object, resulting in a very clean surface, so that the production of various high-precision products has obtained the neces...

Claims

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Application Information

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IPC IPC(8): G01L21/00
CPCG01L21/00
Inventor 刘明山
Owner 润桐(苏州)技术服务有限公司
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