A Two-Channel Simultaneous Phase Shift Interferometric Microsystem

Abstract

The invention discloses a two-channel simultaneous phase-shifting interference microscope system, which relates to the field of optical interference, and includes a light splitting unit, a reference light path unit, a measuring light path unit, a beam combining unit and an image acquisition unit; the light splitting unit is used to separate incident light waves into The transmission directions are perpendicular to each other and the polarization planes are orthogonal to each other measuring beam and reference beam; the reference optical path unit is used to transmit the reference beam and carry out spatial phase shift of the reference beam; the measuring optical path unit is used to transmit the measuring beam and perform spatial phase shift on the measuring beam , and the measurement beam passes through the object to be measured to generate an object beam; the beam combining unit is used to combine the reference beam and the object beam after the spatial phase shift; the image acquisition unit is used to split the combined beam and divide Two phase-shifted interference fringe images are collected on two channels; cost and technical difficulty are reduced, and on the basis of the simultaneous phase shift function in the airspace, it also has the phase shift function in the time domain, and can also correct the measurement system.

Description

Technical field[0001]The invention relates to an optical interference microscopy system, in particular to a dual-channel simultaneous phase shift interference microscopy system.Background technique[0002]In recent decades, with the development of photoelectric image sensing technology, computer technology, and image processing technology, optical phase measurement microscopy has also made great progress; optical phase measurement microscopy has full-field, fast and high-precision , Non-contact, non-damage advantages, through the photoelectric image sensor (such as CCD, CMOS) to collect an interferogram or multiple interferograms with monotonous changes in phase shift, and use the phase demodulation algorithm to calculate the phase distribution of the sample. At the same time, it realizes high-precision measurement of sample three-dimensional topography information, and the measurement accuracy can reach 1 / 100 wavelength; it has a wide range of applications in cell biology, biological...

AI Technical Summary

Problems solved by technology

[0005] 1. Multiple image sensor systems need to ensure that multiple cameras acquire images synchronously, and the inconsistencies in photoelectric performance and different spatial relative positions of multiple CCDs will have a greater impact on the measurement results;

[0006] 2. Simultaneous collection of multiple phase-shift interferograms in different areas of a single CCD target surface will be limited by many conditions, such as the diffraction direction of the grating is affected by the wavelength, so that this method can only be applied to single-wavelength measurement and cannot be used for white light or narrow-band Light measurement, lack of spatial resolution, special image sensor required, etc.;

[0007] 3. Pixel mask components are difficult to achieve wide commercial applications due to high production costs

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