Vertical cavity surface emitting laser
A vertical cavity surface emission and laser technology, which is used in lasers, laser parts, semiconductor lasers, etc. to ensure single-mode operation, reduce parasitic capacitance, and reduce resistance.
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[0036] Such as Figure 1 to Figure 3 As shown, a vertical cavity surface emitting laser described in the present invention will be described in detail with reference to the accompanying drawings.
[0037] figure 1 A cross-sectional structure of a VCSEL according to an embodiment of the present invention is shown. figure 2 enlarged figure 1 and the nearby cross-section shows the first oxidation limited layer 104, the second oxidation limited layer 108, the third oxidation limited layer 110, the fourth oxidation limited layer 112, the fifth oxidation limited layer 114, the sixth oxidation limited layer 116, the seventh Oxidation confinement layer 118 and eighth oxidation confinement layer 120 . figure 2 enlarged figure 1 And the nearby cross-sectional view shows the first oxidation confinement layer 104, the second oxidation confinement layer 108, the third oxidation confinement layer 110, the fourth oxidation confinement layer 112, the fifth oxidation confinement layer 11...
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