Waste gas treatment device

Abstract

The invention provides a waste gas treatment device. The device comprises waste gas leading-in pipes, a combustion box, a water tank and an exhaust pipe, wherein the combustion box is located at the upper part of the waste gas treatment device, the waste gas leading-in pipes are located at the upper part of the combustion box, the lower part of the combustion box and the upper part of the water tank are jointly provided with two guide plates, a specified space is formed between the two guide plates, and spraying nozzles are arranged in the space. The waste gas treatment device is of an integrated structure, small in occupied area and high in gas treatment capacity, and in addition, cleaning can be carried out without suspending during operation of the device.

Description

technical field [0001] The invention belongs to the field of environmental protection, in particular relates to the treatment of related waste gas in semiconductor manufacturing, and especially designs a waste gas treatment device. Background technique [0002] Waste gas treatment can be divided into wet treatment method and dry treatment method. The wet treatment method mainly uses water to clean and cool the waste gas. Relatively speaking, it has the advantages of relatively simple structure, easy production and large capacity treatment, but it cannot deal with non-water-soluble gases, especially not suitable for treatment. The problem of highly flammable exhaust gases containing hydrogen. [0003] The dry process is constructed by direct combustion of the exhaust gas through the furnace of the hydrogen burner, or through the heat source to form a high temperature to allow the exhaust gas to pass through and indirect combustion. Therefore, dry treatment has excellent eff...

AI Technical Summary

Problems solved by technology

However, the hybrid exhaust gas treatment device of the above-mentioned type is firstly composed of separate vertical combustion tanks and vertical water tanks connected by connecting pipes, so it has the disadvantage of occupying a large area; secondly, the above-mentioned hybrid exhaust gas The treatment unit has the disadvantage of requiring frequent cleaning of the equipment due to the generation of a large amount of powder through the parts of the combustion box that come into contact with the water

Because the cleaning of the exhaust gas treatment device will cause the interruption of the main project of exhaust gas emission, there are also great disadvantages in terms of productivity; again, the above-mentioned types of exhaust gas treatment devices have chemical reactions due to contact with water and thus have a chemical reaction with toxic gases. The combined water molecules will corrode the parts that come into contact with the atmosphere; finally, the above-mentioned types of hybrid exhaust gas treatment devices have limited capacity to treat exhaust gas due to their limited size.

The exhaust gas treatment device is required to occupy a small area, so the treatment capacity will be limited depending on the size of the occupied area

At the same time, this type of exhaust gas treatment device needs to be fully heated for the combustion of exhaust gas, that is, the inner diameter is required to be small, but in order to be able to fully burn, it needs to ensure sufficient length, so it is limited when processing a large amount of exhaust gas at the same time.

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