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Electrical heating spraying board with radio frequency introducing function and temperature control system thereof

A spray plate and electric heating technology, which is applied in gaseous chemical plating, metal material coating process, coating, etc., can solve the problem that the temperature of the spray plate cannot meet the more severe process requirements, so as to increase the temperature and reduce the The effect of equipment cost and ease of installation and maintenance

Active Publication Date: 2019-04-09
PIOTECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] This patent aims to propose an electric heating spray plate and its temperature control system, which mainly solves the problem that the temperature of the spray plate cannot meet the more severe process requirements in the field of semiconductor manufacturing at the present stage; Heating spray plate and its temperature control system, the system achieves precise temperature control through the cooperation of electric heaters, thermocouples and temperature controllers

Method used

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  • Electrical heating spraying board with radio frequency introducing function and temperature control system thereof
  • Electrical heating spraying board with radio frequency introducing function and temperature control system thereof
  • Electrical heating spraying board with radio frequency introducing function and temperature control system thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Such as figure 1 , figure 2 and image 3 As shown, the electric heating spray plate introduced with radio frequency includes the following structure: grounding flange 1, thermocouple 2, 14, insulating ceramic sleeve 3, shielding aluminum sleeve 4, spray plate sealing flange 5, spray plate Plate 6, spray plate 11, heating wire 13. The shower plate is the channel used in the deposition process, and its function and shape are similar to the shower head at home. In semiconductor thin film equipment, the shower plate is an indispensable component, and the orifice plate with gas circulation is usually installed in the vacuum chamber cavity, such as figure 1 11 in.

[0027] Above the spray plate 11 is the spray upper plate 10, and there are two passages 17 and 18 for circulating process gas inside the spray upper plate, such as figure 2 shown.

[0028] Above the spray upper plate is the spray plate sealing flange 5, above which the flange is in the atmosphere, and belo...

Embodiment 2

[0035] Such as Figure 4 , 5 As shown, a temperature control system accompanied by radio frequency introduction includes a temperature control system and an alarm system; the system is specifically: a heating wire and two thermocouples are installed in the spray plate, and the thermocouple 2 is used for temperature control. Couple 14 is used for alarm; the thermostat outputs power to the heating wire to reach the set temperature, and the thermocouple 2 feeds back the temperature value to the thermostat in real time, and the thermostat can realize the precise control of the temperature of the spray plate through PID automatic adjustment; An alarm temperature value is set, and when the temperature detected by the thermocouple 14 is higher than the alarm value, the alarm module will cut off the power output of the thermostat to the heating wire.

[0036] The spray plate will become a charged body after the radio frequency is introduced, and the heating wire and the thermocouple ...

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Abstract

The invention relates to an electrical heating spraying board and a temperature control system thereof. The system achieves precise control of the temperature through cooperation of an electrical heater, a thermocouple and a temperature controller. The spraying board can be heated to 400 DEG C or below, the temperature upper limit is mainly limited by materials of heating wires and the spraying board, and if a high-temperature-resistant material can be adopted in the system, the 400 DEG C temperature limit can be broken. The purpose that radio frequency is introduced into an upper electrode through the spraying board on the condition that a filter is not additionally arranged is achieved, the high-temperature (200 DEG C or above) requirements can be met, disassembling cleaning can be achieved, the equipment occupation area is not increased, and the equipment cost is reduced.

Description

technical field [0001] The invention belongs to the technical field of semiconductor thin film deposition application and manufacture, and in particular relates to an electric heating spray plate accompanied by radio frequency introduction and a temperature control system thereof. Background technique [0002] At present, in the field of semiconductor thin film deposition application and manufacturing technology, the temperature control of the spray plate adopts two methods: fluid heating and electric heating. The fluid-heated spray plate is divided into one-piece spray plate and split spray plate. The one-piece spray plate is mostly made of welding, and there are fluid channels in the spray plate. The advantage of this method is that the heat conduction effect is good, and the temperature The uniformity is good, but the disadvantage is that it is expensive, and the temperature is limited by the fluid and cannot be too high. Most of the split type spray panels have upper an...

Claims

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Application Information

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IPC IPC(8): C23C16/455C23C16/52
CPCC23C16/45565C23C16/4557C23C16/52
Inventor 戴佳卉金基烈吴凤丽谭华强
Owner PIOTECH CO LTD
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