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Inverse oscillation adaptive control method of fractional-order arched MEMS resonator

A technology of adaptive control and resonator, applied in the direction of adaptive control, general control system, control/regulation system, etc., can solve the problems of inability to deal with nonlinear functions and dependencies of dynamic models

Active Publication Date: 2019-04-12
CHONGQING AEROSPACE POLYTECHNIC COLLEGE
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Problems solved by technology

These methods rely heavily on accurate system modeling and cannot handle unknown nonlinear functions in dynamic models

Method used

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  • Inverse oscillation adaptive control method of fractional-order arched MEMS resonator
  • Inverse oscillation adaptive control method of fractional-order arched MEMS resonator
  • Inverse oscillation adaptive control method of fractional-order arched MEMS resonator

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Embodiment Construction

[0146] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0147] 1. Question posing and mathematical basis

[0148] The arched MEMS resonator consists of direct current (DC), alternating current (AC), bottom electrode, double-clamped arch-sharpened microbeams, two anchors, and an integrated operational amplifier. Obviously, the fundamental resonant frequency of this arched MEMS resonator is higher than that of a fixed or cantilever beam. figure 1 A schematic of an electrostatically driven arched MEMS resonator is shown. When the gap distance is g 0 And when the bottom electrode placed parallel to the X-axis works, the electrostatic drive is performed. Quantities with physical dimensions are expressed as Using the Galerkin decomposition method, the dynamic model of the fractional arch MEMS resonator with unknown excitation characteristics is written as

[0149]

[0150] where the variable...

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Abstract

The invention relates to an inverse oscillation adaptive control method of a fractional-order arched MEMS resonator, and belongs to the field of inverse oscillation control. In the design process, uncertain items are compensated through a Chebyshev neural network with updated single weights, and the problem of the unknown control direction caused by the excitation characteristic in Caputo fractional-order calculus is solved through the Nussbaum function; meanwhile, a tracking differentiator based on the hyperbolic sine function is designed, and the problem of repeated differential with complexfractional-order calculation in virtual control is solved; then under an adaptive backstepping control frame, through a continuous frequency distribution model, an inverse oscillation adaptive control scheme integrated with the Nussbaum function, the neural network and the tracking differentiator is invented; on the basis of the criterion of the fractional-order Lyapunov stability, the asymptoticstability of a closed-loop system is proven; and finally, the validity of the proposed scheme is verified through numerical simulation.

Description

technical field [0001] The invention belongs to the field of anti-oscillation control, and relates to an anti-oscillation self-adaptive control method of a fractional-order arched MEMS resonator. Background technique [0002] In recent years, fractional calculus, as an extension of integer calculus, has attracted widespread attention in the fields of electronic engineering, robotics, bioengineering, and signal processing. It has potential advantages such as robustness, design freedom and transient performance, and can accurately describe actual engineering objects and processes, and is widely used in control systems. Microelectromechanical systems (MEMS) resonators have attracted extensive attention due to their wide range of applications in sensors, microvalves, switches, and filters. MEMS resonators have highly nonlinear properties such as parallel-plate forcing, mid-plane and squeeze-film damping. These properties can lead to chaotic oscillations, which are undesirable ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B13/04
CPCG05B13/042G05B13/04
Inventor 罗绍华刘昭琴屈涌杰葛志宏
Owner CHONGQING AEROSPACE POLYTECHNIC COLLEGE
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