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Electron beam evaporative vacuum coating equipment

A vacuum coating machine and electron beam evaporation technology, applied in vacuum evaporation coating, ion implantation coating, sputtering coating and other directions, can solve the problems of complex mechanism, low coating efficiency, low uniformity and repeatability of coating structure, etc. The effect of high coating efficiency, high uniformity and repeatability, and simple mechanism

Inactive Publication Date: 2019-04-16
湖南宇诚精密科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] At present, due to the shortcomings in the design of the existing electron beam evaporation vacuum coating, it has the defects of complex mechanism, low uniformity and repeatability of the coating structure, and low coating efficiency.

Method used

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  • Electron beam evaporative vacuum coating equipment

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Experimental program
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Effect test

Embodiment

[0015] refer to figure 1 , an electron beam evaporation vacuum coating machine, including 1 set of cavity assembly 1, 1 set of umbrella frame assembly 2, 1 set of high valve assembly 3, 1 set of cryogenic system 4, 1 set of piping system 5, 2 oil filters Components 6, 2 diffusion pumps 7, 1 Roots pump 8, 2 mechanical pumps 9, 1 set of ion source components 10, 1 set of electron gun components 11, 1 set of electric control cabinet components 12, 1 set of trunking components 13, Two door clamping assemblies 14 and a set of pedal assemblies 15; the umbrella stand assembly 2 is fixed on the cavity assembly 1, the high valve assembly 3 is connected with the cavity assembly 1, the high valve assembly 3, The diffusion pump 7, the Roots pump 8 and the mechanical pump 9 are connected together through the pipeline system 5, and the door clamping assembly 14 is installed on the chamber assembly 1, and is used to control the pressing and closing of the door and the chamber on the chamber ...

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Abstract

The invention relates to electron beam evaporative vacuum coating equipment which comprises a cavity assembly, an umbrella frame assembly, a high valve assembly, a copious cooling system, a pipeline system, a diffusing pump, a roots pump, a mechanical pump, an ion source pump, an electron gun assembly, an electric control cabinet assembly, a linear slot assembly and a door clamping assembly. The umbrella frame assembly is fixed to the cavity assembly, the high valve assembly is connected to the cavity assembly, the high valve assembly, the diffusing pump, the roots pump and the mechanical pumpare connected together through a pipeline system, and the door clamping assembly is mounted on the cavity assembly. An electron gun part of the electron gun assembly and an ion source part of the ionsource assembly are mounted in the cavity assembly. The copious cooling system comprises two copious cooling coils, one of which is mounted in the cavity assembly while the other one of which is mounted in the high valve assembly. The electron beam evaporative vacuum coating equipment has the characteristics of being simple in mechanism, high in uniform repeatability of coating structure and highin coating efficiency, and the cavity dimension can reach 2700 mm and the like.

Description

technical field [0001] The invention relates to an electron beam evaporation vacuum coating machine. Background technique [0002] At present, due to the shortcomings in the design of the existing electron beam evaporation vacuum coating, it has the defects of complex mechanism, low uniformity and repeatability of the coating structure, and low coating efficiency. Contents of the invention [0003] The technical problem to be solved by the present invention is to provide an electron beam evaporation vacuum coating machine with simple mechanism, high uniformity and repeatability of coating structure, chamber size up to 2700mm, and high coating efficiency. [0004] The technical solution adopted by the present invention to solve the technical problem is: an electron beam evaporation vacuum coating machine, including a cavity assembly, an umbrella stand assembly, a high valve assembly, a cryogenic system, a pipeline system, a diffusion pump, a Roots pump, Mechanical pump, io...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/30
CPCC23C14/30
Inventor 杨佳葳龚涛蔡国龚平谢俊
Owner 湖南宇诚精密科技有限公司
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