Crucible for point evaporation source

A technology of evaporation source and crucible, which is applied in the field of evaporation process, can solve the problems of waste of metal materials, failure to improve the utilization rate of metal materials of point evaporation sources, cleaning troubles, etc., and achieve the effect of avoiding the troubles of cleaning

Inactive Publication Date: 2019-04-23
FUJIAN HUAJIACAI CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the process of vacuum evaporation, the crucible with a point evaporation source will be used to hold the metal material. Because of the influence of the position of the cavity, the point evaporation source cannot improve the utilization rate of the metal material, resulting in waste of metal materials.
At the same time, during the vacuum evaporation process, part of the metal material sprayed out will be plated on the cavity wall, causing cleaning troubles and waste of metal materials

Method used

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  • Crucible for point evaporation source
  • Crucible for point evaporation source

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Experimental program
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Embodiment 1

[0032] Please refer to figure 1 , Embodiment 1 of the present invention is:

[0033] A crucible for a point evaporation source, comprising a hollow crucible body 1, the top of the crucible body 1 has an opening 2, the side wall where the opening 2 is located is provided with a guide part 3, the guide part The angle between 3 and the horizontal plane is configured so that the evaporated material loaded in the crucible body 1 can be guided to the external substrate through the guide part 3 .

[0034] The included angle between the guide part 3 and the horizontal plane is 45-65 degrees.

[0035] A plurality of crucible bodies 1 are arranged around the lower part of the substrate.

[0036] The air guiding part 3 is disposed away from the substrate.

[0037] During the production process, the flow guiding part 3 is integrally formed on the side wall where the opening 2 is located.

Embodiment 2

[0038] Please refer to figure 2 , the second embodiment of the present invention is:

[0039] The difference from the above-mentioned first embodiment is that the second embodiment is an improvement made on the existing crucible body 1 that has been produced, specifically, a guide part 3 is added on the side wall where the opening 2 is located, and the guide part 3 is added. The flow part 3 is a shielding piece, and one end of the shielding piece is connected to the side wall where the opening 2 is located.

[0040] When the melting point of the evaporated material is 100-300° C., the guide part 3 can be made of tempered glass.

[0041] When the melting point of the vapor deposition is 300-1800° C., the material of the guide portion 3 is graphite or ceramics.

[0042] It is also possible to uniformly use graphite or ceramics.

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Abstract

The invention relates to the technical field of evaporation processes, in particular to a crucible for a point evaporation source. The crucible comprises a crucible body which is hollow inside. An opening is formed in the top end of the crucible body, and a flow guiding part is arranged on the side wall where the opening is located. The flow guiding part is arranged on the side wall where the opening of the crucible body is located, the spraying angle of evaporation objects in the crucible body can be adjusted through the included angle formed between the flow guiding part and the horizontal plane, the evaporation objects are fully deposited on a substrate, and the situation that cleaning troubles and waste of the evaporation objects are caused by the fact that the wall of a cavity is plated with the evaporation objects is avoided.

Description

technical field [0001] The invention relates to the technical field of evaporation process, in particular to a crucible for a point evaporation source. Background technique [0002] Organic Light-Emitting Diode (Organic Light-Emitting Diode, abbreviated as OLED). At present, vacuum thermal evaporation is the main film-forming technology in the OLED production process. In a high-vacuum environment, the crucible containing organic materials or metal materials is heated to evaporate the organic materials or metal materials and deposit them on the substrate to form a single layer. or multilayer films. In OLED devices, the role of metal materials is that it has a low work function on the one hand, which is conducive to the effective injection of electrons or holes into organic materials, and on the other hand, it takes into account the micro-resonant cavity. In the process of vacuum evaporation, the crucible with point evaporation source will be used to hold the metal material....

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/14
CPCC23C14/14C23C14/243
Inventor 不公告发明人
Owner FUJIAN HUAJIACAI CO LTD
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