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Ion implanter TILT servo system angle control strategy based on full-closed-loop double-feedback

An ion implanter and servo system technology, which is applied in the field of angle control strategy of TILT servo system of ion implanter based on full closed-loop double feedback, can solve the problem that the angle control accuracy of TILT servo control mode is not high, cannot correct deviation, and cannot adapt to the development of semiconductor technology. Demand and other problems, to achieve the effect of overcoming sudden changes in mechanical load, avoiding resonance problems, and high stability

Inactive Publication Date: 2019-04-23
BEIJING ZHONGKEXIN ELECTRONICS EQUIP
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AI Technical Summary

Problems solved by technology

Therefore, the angle control accuracy of the traditional semi-closed-loop TILT servo control method is not high, and at the same time, it cannot perform real-time correction for external disturbances, which can no longer meet the development needs of future semiconductor processes.

Method used

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  • Ion implanter TILT servo system angle control strategy based on full-closed-loop double-feedback
  • Ion implanter TILT servo system angle control strategy based on full-closed-loop double-feedback

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Embodiment Construction

[0016] The present invention will be further introduced below in conjunction with the accompanying drawings and specific embodiments, but not as a limitation of the present invention.

[0017] The present invention is realized through the following technical solutions:

[0018] 1. The servo controller (1) is used to carry out the servo loop closed loop of the servo motor (4), and the position loop and the speed loop are closed in the servo controller in this invention. The servo controller (1) sends command signals to the servo driver (2), and receives signals from the feedback device encoder (3) (4), and controls the position of the mechanical transmission mechanism (5) in real time to reach a specified position. The instruction signal sent by the servo controller (1) to the servo driver (2) is an analog quantity within a voltage range of ±10V.

[0019] 2. The servo driver (2) receives the analog voltage signal from the servo controller (1), and outputs a specified current f...

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PUM

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Abstract

The invention provides an ion implanter TILT servo system angle control method based on full-closed-loop double-feedback. The ion implanter TILT servo system angle control method is applied to semiconductor manufacturing ion implantation circumstances. According to the ion implanter TILT servo system angle control method, the following hardware is included, specifically, 1, a servo controller, 2,a servo driver with a double-feedback channel, 3, a high-precision orthogonal load encoder, 4, a servo motor and a motor encoder and 5, a TILT mechanical transmission part. According to the ion implanter TILT servo system angle control strategy based on full-closed-loop double-feedback, the ion implanter TILT servo system angle control method is described in detail in the specification, and the specific implementation scheme is given.

Description

technical field [0001] The present invention is an ion implanter TILT servo system angle control strategy based on fully closed-loop double feedback. The method uses two orthogonal photoelectric encoders, a load encoder and a motor encoder, as feedback, and is connected to the main feedback channel and the main feedback channel of the driver. The secondary feedback channel, so that the two feedbacks are respectively embedded in the speed loop and position loop of the servo control loop in the controller, which improves the position control accuracy and anti-disturbance ability of the TILT servo system, and reduces the possibility of resonance. Background technique [0002] Ion implantation is an important doping technology in semiconductor processing. With the development of more advanced semiconductor manufacturing processes, the accuracy requirements for the ion implantation process angle are becoming more and more stringent. The TILT process angle has the greatest impact ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05D13/62
CPCG05D13/62
Inventor 方加晔贾久宇
Owner BEIJING ZHONGKEXIN ELECTRONICS EQUIP
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