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Novel evaporation metal mask plate and evaporation device

A metal mask, metal mask technology, applied in vacuum evaporation coating, metal material coating process, sputtering and other directions, can solve the problem that the mask cannot be closely attached to the substrate, and the mask and the silicon wafer are displaced. and other problems, to achieve the effect of eliminating shadow effect, avoiding movement dislocation, and increasing service life

Inactive Publication Date: 2019-04-26
LAKESIDE PHOTOELECTRONICS TECH JIANGSU CO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The existing mask cannot be closely attached to the substrate (for example, a silicon wafer), or the movement of the mask and the silicon wafer is dislocated during the evaporation process

Method used

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  • Novel evaporation metal mask plate and evaporation device
  • Novel evaporation metal mask plate and evaporation device
  • Novel evaporation metal mask plate and evaporation device

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Embodiment Construction

[0024] Such as figure 1 , image 3 and Figure 4 As shown, a new metal mask for evaporation of the present invention includes a mask body 201, a circular groove 1 is opened on the mask body 201, and several In the opening 202 of the diffusion material, the two sides of the mask body 201 are provided with slots 203 for installation; the cross section of the opening 202 is trapezoidal, which is beneficial for the material to diffuse to the silicon wafer 3 through the metal mask 2, The thickness of the opening is 2-3mm. In order to prevent deformation of the mask during pressing, a reinforcing rib 204 is fixed on the back of the mask body 201 .

[0025] Such as figure 2 As shown, the present invention also includes a novel vapor deposition device, including the above-mentioned metal mask 2, the metal mask 2 is arranged on the base, and lifting rods 6 are fixed on both sides of the base; A support for placing the silicon wafer 3 and a clamp for pressing the silicon wafer 3 a...

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Abstract

The invention relates to the technical field of evaporation, in particular to a novel evaporation metal mask plate. A mask plate body is included and provided with a circular groove. A plurality of openings for material diffusion are formed in the circular groove, and the two sides of the mask plate body are provided with clamp grooves for installation. The sections at the opening positions are ina trapezoid shape. After the above structure is adopted, the novel evaporation metal mask plate has the following advantages that firstly, through the mask plate, gaps between a silicon wafer and themask plate can be effectively eliminated, and the shadow effect in the evaporation process is obviously removed; secondly, through the mask plate, moving and dislocation between the mask plate and the silicon wafer in the evaporation process can be effectively avoided; thirdly, after the mask plate is used for a long time, obvious deformation does not happen, and the service life is prolonged; and fourthly, after the mask plate is used for a long time, the situation of fragmenting cannot happen.

Description

technical field [0001] The invention relates to the technical field of vapor deposition, in particular to a novel metal mask plate for vapor deposition and a vapor deposition device. Background technique [0002] Organic Light Emitting Diode (OLED) display devices have been widely concerned due to their advantages of simple structure, high response, high contrast ratio, easy forming flexibility and wide viewing angle. The existing OLED production usually adopts organic evaporation coating technology, which uses a high-precision metal mask (Fine Metal Mask, FMM for short) as a mask, and the organic evaporation material passes through the opening of the mask in the state of steam molecules after being heated. thus evaporated onto the backplane. [0003] Chinese invention patent CN 109182967 A discloses a mask plate and an evaporation device, wherein the mask plate includes a mask plate body, and the mask plate body includes at least one opening area; the mask plate also inclu...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042C23C14/24
Inventor 褚天舒
Owner LAKESIDE PHOTOELECTRONICS TECH JIANGSU CO
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