Nitrogen and hydrogen mixed gas vacuum leak hole calibration device and method

Abstract

The invention discloses a nitrogen and hydrogen mixed gas vacuum leak hole calibration device. The device comprises a hydrogen gas and nitrogen gas supply system, a gas distribution chamber, a pressure gauge, a gas obtaining chamber, a low vacuum pump, a gas inlet chamber, a vacuum gauge, a high vacuum pump, a seepage device, a mass spectrometer, a non-evaporable getter pump, a calibration systemand a gas extracting system; the pressure gauge is arranged on the gas distribution chamber; the gas distribution chamber is divided into two paths; one path is connected with the gas obtaining chamber and the gas inlet chamber; the other path is connected with the high vacuum pump through a pipeline; the hydrogen gas and nitrogen gas supply system and the low vacuum pump are arranged between thegas distribution chamber and the high vacuum pump; the high vacuum pump is connected with the gas inlet chamber; the gas inlet chamber is sequentially connected with the seepage device, the calibration system and the gas extracting system through pipelines; the pressure gauge and the vacuum gauge are arranged on the gas inlet chamber; a stop valve is arranged between the seepage device and the calibration system; a nitrogen and hydrogen mixed gas vacuum leak hole is connected to the calibration system; the pressure gauge, the vacuum gauge and the mass spectrometer are arranged on the calibration system; and the non-evaporable getter pump is connected to the calibration system.

Description

technical field [0001] The invention relates to the field of measurement, in particular to a nitrogen-hydrogen mixed gas vacuum leak calibration device and method. Background technique [0002] my country's space high-orbit satellites, low-orbit satellites, hydrogen atomic clocks, rocket hydrogen-oxygen engines and other models are mainly developed for high-orbit satellites and low-orbit satellites. Leakage problem. Hydrogen is used as the working medium in the tasks of the above models. Due to the high permeability of hydrogen, low viscosity, and inflammability and explosion, once a leak occurs, the consequences will be disastrous. If other leak-indicating gases are used for leak detection, It will lead to a deviation in the actual leak rate value, which will seriously affect the judgment of the model developer on its performance, which will affect the high reliability and working life of the model task. Therefore, in order to ensure the safe and reliable operation of the mo...

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Problems solved by technology

The above three methods are mainly used in the calibration of a single gas helium. When applied to nitrogen-hydrogen mixed gas vacuum leaks, only approximate conversion can be used to roughly calibrate the leak rate of nitrogen-hydrogen mixed gas leaks. The leak rate of nitrogen-hydrogen mixed gas leaks has not yet been solved. precise calibration of

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