Chlorosilane pretreatment method
A technology of chlorosilane and polysilicon, which is applied in the field of chlorosilane pretreatment, can solve the problems of damaged analytical instruments, chromatographic separation system damage, and easy blockage of dirty chlorosilane, so as to achieve good test reproducibility and make up for missing items in system monitoring , cost-saving effect
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[0026] In order to enable those skilled in the art to better understand the technical solution of the invention, the present invention will be further described in detail below in conjunction with specific embodiments.
[0027] Chlorosilane pretreatment method of the present invention, comprises the steps:
[0028] S1 extracts the sample liquid from the rectified solution in the polysilicon production process;
[0029] S2 transfers the sample solution to a centrifuge tube;
[0030] S3 places the centrifuge tube in the centrifuge;
[0031] S4 starts the centrifuge to centrifuge;
[0032] S5 takes the supernatant of the centrifuge tube after centrifugation;
[0033] S6 takes the supernatant and analyzes it with a chromatograph.
[0034] Preferably, after step S1 and before step S2, the temperature of the sample solution is lowered.
[0035] Preferably, after step S5 and before step S6, the supernatant is placed at room temperature.
[0036] The rectification is rectificati...
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