High-voltage isolation ring device of gate drive circuit
A gate drive circuit and high-voltage isolation technology, applied in circuits, electrical components, semiconductor devices, etc., can solve problems such as reliability, high depletion electric field, and early failure of devices, so as to improve withstand voltage stability and reduce electric field strength , Improve the effect of product reliability
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[0061] Such as figure 2 Shown is a cross-sectional structure diagram of the high-voltage isolation ring device of the gate drive circuit of the embodiment of the present invention. The high-voltage isolation ring device of the gate drive circuit of the embodiment of the present invention is composed of LDMOS, including:
[0062] A P-type substrate 1 , an N-type epitaxial layer 2 is formed on the surface of the P-type substrate 1 .
[0063] A P-type buried layer and an N-type buried layer 10 are formed in selected regions of the interface between the P-type substrate 1 and the N-type epitaxial layer 2 .
[0064] The P-type buried layer includes a first P-type buried layer 8a, a second P-type buried layer 8b and a third P-type buried layer 8c.
[0065] A first high-voltage P well 9a is formed in the N-type epitaxial layer 2 between the top surface of the first P-type buried layer 8a and the top surface of the N-type epitaxial layer 2. A second high voltage P well 9b is formed...
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