Excimer laser temperature control device and method
A technology of excimer laser and temperature control device, which is applied in laser cooling device, laser, temperature control by electric method, etc., can solve the problems of high electromagnetic interference intensity, little anti-electromagnetic interference treatment, affecting laser stability, etc. Achieve the effect of improving stability and reliability, improving anti-electromagnetic interference ability, and improving system real-time performance
Pending Publication Date: 2019-05-28
RAINBOW SOURCE LASER RSLASER
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Problems solved by technology
During the working process of the excimer laser, it is necessary to excite the high-voltage discharge of the gas medium. The required voltage is formed by the power module, high-voltage booster module, solid-state switch and magnetic pulse compression to form tens of kilovolts, microsecond pulse width, and thousands of amperes peak current. Signal, this process has strong electromagnetic interference, the electromagnetic interference is strong, and the frequency covers the entire range from power frequency to radio frequency, and will enter the temperature control system of the laser through space coupling and ground wire series connection. Interference with the control signal seriously affects the stability of the laser. The existing temperature control system for excimer lasers has little anti-electromagnetic interference, which results in inaccurate data collection and control of the temperature control system. , it will cause the disorder of the temperature control system, so that the working temperature of the laser cannot be accurately maintained in a suitable temperature environment
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[0034] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0035] In order to make the description of the present disclosure more detailed and complete, the following provides an illustrative description of the implementation modes and specific examples of the present invention; but this is not the only form for implementing or using the specific embodiments of the present invention. The description covers features of various embodiments as well as method steps and their sequences for constructing and operating those embodiments. However, other embodiments can also be used to achieve the same or equivalent functions and step sequences.
[0036] F...
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The invention provides an excimer laser temperature control device and method. A terminal of the device is in communication connection with a water cooling plant main controller and a water cooling PID control module through a CAN bus, so that the anti-electromagnetic interference capability of a system is improved; factory water information and temperature control information acquired by the water cooling plant main controller and the water cooling PID control module are effectively subjected to information storage and parameter configuration in real time through the terminal; two embedded temperature acquisition and control units of the water cooling plant main controller and the water cooling PID control module in distributed processing are adopted, module functional division is achieved, the real-time performance of the system is improved, the safety of sudden locking of a certain module of the system is improved, and in general, the stability and the reliability of the whole temperature control system are improved.
Description
technical field [0001] The invention relates to the technical field of gas lasers, in particular to a laser temperature control device, in particular to an excimer laser temperature control device and method. Background technique [0002] The energy conversion efficiency of the excimer laser laser output is low, and most of the input electric energy is converted into heat. If the heat cannot be dissipated in time, the temperature of the working gas will rise rapidly. The temperature of the laser working environment has a great influence on the energy conversion efficiency and energy stability of the laser. The laser working environment has an optimal temperature range. In this temperature range, the laser has high energy conversion efficiency and energy stability. During the working process of the excimer laser, it is necessary to excite the high-voltage discharge of the gas medium. The required voltage is formed by the power module, high-voltage booster module, solid-state ...
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Login to View More IPC IPC(8): H01S3/04H01S3/041G05D23/19
Inventor 张华韩晓泉冯泽斌江锐张琴廖密王香杨军红
Owner RAINBOW SOURCE LASER RSLASER