Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Mask assembly and exposure method thereof

A component and mask technology, applied in the field of flat panel display, can solve the problem of high cost, achieve the effect of reducing process cost, facilitating cost control, and reducing quantity

Active Publication Date: 2022-07-19
INESA DISPLAY MATERIALS
View PDF0 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The production of color filter substrates with different shapes, line widths, and line spacings in the prior art often has the problem of high cost

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Mask assembly and exposure method thereof
  • Mask assembly and exposure method thereof
  • Mask assembly and exposure method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0056] It can be known from the background art that the cost of forming color filter substrates with different shapes, line widths and line spacings in the prior art is relatively high. Now combined with the structure of a color filter substrate to analyze the reasons for its high cost:

[0057] According to the different requirements of end customers, the shape of each layer on the color filter substrate will be adjusted accordingly: in fast-moving consumer goods such as mobile phones and tablets, the liquid crystal display panel needs to have bright colors (hue, color saturation, brightness), image quality Clear (resolution, PPI), smooth picture (liquid crystal response speed) and other characteristics, but because the environment in which fast-moving consumer goods are generally relatively stable, so fast-moving consumer goods have an impact on product life (reliability, adhesion) and stability (extremely high and low temperature). , high humidity, continuous vibration) is ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A mask assembly and an exposure method thereof, wherein a first mask plate and a second mask plate are arranged overlappingly, so that the first pattern of the first mask plate and the second pattern of the second mask plate are matched to A target pattern is formed with a first pair of offset marks for alignment with corresponding fiducial marks. Therefore, through the combination of the first pattern and the second pattern, target patterns of different shapes can be formed; and the distance between the pairs of first offset marks is not equal to the distance between adjacent reference marks, so by making different first offset marks The mark pair is aligned with the corresponding reference mark, so that relative displacement is generated between the first pattern and the second pattern to form target patterns with different line widths and line spacings; that is, the technical solution of the present invention can pass through a mask assembly. Forming target patterns with different shapes, line widths and line spacings can effectively reduce the number of masks, effectively reduce process costs, and further facilitate cost control of color filter substrates.

Description

technical field [0001] The present invention relates to the field of flat panel display, in particular to a mask assembly and an exposure method thereof. Background technique [0002] Liquid crystal display devices are widely used in various fields due to their advantages of small size, light weight and low radiation. [0003] The liquid crystal display panel is the most important component in the liquid crystal display device. The liquid crystal display panel includes an array substrate (Thin Film Transistor, ie a TFT substrate), a color filter substrate (ColorFilter, ie a CF substrate) opposite to the array substrate, and a liquid crystal filled between the array substrate and the color filter substrate. . Wherein, the electrodes on the array substrate and the color filter substrate control the deflection of liquid crystal molecules to adjust the pass rate of external light, thereby achieving the purpose of display. [0004] refer to figure 1 , showing a schematic cros...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20
Inventor 郁侃徐广军范刚洪王群
Owner INESA DISPLAY MATERIALS
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com