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Metal source residual amount detection device and method and evaporation equipment

A detection device and residual quantity technology, applied in measuring devices, mechanical equipment, lubrication indicator devices, etc., can solve problems such as inability to obtain accurate residual quantity, inability to accurately guide production and debugging, and large errors

Pending Publication Date: 2019-06-07
上海祖强能源有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, no matter in trial production or large-scale production, the amount of metal source filler remaining in the crucible in the production process is judged according to the experience of technicians, and the accurate remaining amount cannot be obtained. The error is large, and it is impossible to accurately guide production and debugging

Method used

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  • Metal source residual amount detection device and method and evaporation equipment
  • Metal source residual amount detection device and method and evaporation equipment
  • Metal source residual amount detection device and method and evaporation equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0046] Such as figure 1 As shown, a detection device for the remaining amount of a metal source proposed in Embodiment 1 of the present invention includes: an ultrasonic generator 1, an acoustic wave receiver 2 and a controller 3, and the ultrasonic generator 1 is arranged on the outer wall of the evaporation crucible 4 The lower side or the bottom of the evaporation crucible 4, the ultrasonic generator 1 is used to generate ultrasonic waves; the acoustic wave receiving end 21 of the acoustic wave receiver 2 is arranged on the outer wall upper side of the evaporation crucible 4, and the acoustic wave receiver 2 is used to receive ultrasonic waves. The ultrasonic wave generated by the device 1; the controller 3 is used to determine the current evaporation crucible 4 according to the waveform of the ultrasonic wave received by the acoustic wave receiver 2, and the preset corresponding relationship between the remaining amount of the metal source in the evaporation crucible 4 and ...

Embodiment 2

[0062] Such as Figure 9 As shown, a method for detecting the remaining amount of a metal source proposed in Embodiment 2 of the present invention is used for the detection device for the remaining amount of a metal source provided in Embodiment 1, which includes:

[0063] 201. Receive the waveform of the ultrasonic waves received by the sound wave receiver.

[0064] Specifically, according to the device provided in Embodiment 1, the part that emits ultrasonic waves is an ultrasonic generator arranged on the lower side of the outer wall of the evaporation crucible or the bottom of the evaporation crucible, and the part that receives ultrasonic waves is arranged on the upper side of the outer wall of the evaporation crucible. acoustic receiver.

[0065] 202. According to the waveform of the ultrasonic wave and the preset corresponding relationship between the remaining amount of the metal source in the evaporation crucible and the ultrasonic waveform, determine the remaining a...

Embodiment 3

[0072] A kind of vapor deposition equipment that embodiment three of the present invention proposes, it comprises: such as figure 1 The detection device for the remaining amount of the metal source shown; the detection device for the remaining amount of the metal source includes: an ultrasonic generator 1, an acoustic wave receiver 2 and a controller 3, and the ultrasonic generator 1 is arranged on the lower side of the outer wall of the evaporation crucible 4 or the bottom of the evaporation crucible 4, the ultrasonic generator 1 is used to generate ultrasonic waves; Ultrasound; the controller 3 is used to determine the current metal source in the evaporation crucible 4 according to the waveform of the ultrasonic wave received by the acoustic wave receiver 2, and the preset relationship between the remaining amount of the metal source in the evaporation crucible 4 and the waveform of the ultrasonic wave. The remaining amount.

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Abstract

The invention relates to a metal source residual amount detection device and method and evaporation equipment and relates to the field of detection equipment. The technical scheme adopted is mainly characterized in that the metal source residual amount detection device comprises an ultrasonic generator, which is arranged at the lower side of the outer wall of an evaporation crucible or at the bottom of the evaporation crucible, and is used for generating ultrasonic; an ultrasonic receiver, which is arranged on the upper side of the outer wall of the evaporation crucible and is used for receiving the ultrasonic generated by the ultrasonic generator; and a controller, which is used for determining the residual amount of the metal source in the current evaporation crucible according to the waveform of the ultrasonic received by the ultrasonic receiver and a preset correspondence relation between the residual amount of the metal source in the evaporation crucible and the waveform of the ultrasonic. The metal source residual amount detection device can accurately determine the residual amount of the metal source in the evaporation crucible in the evaporation production process, and is used for guiding production and debugging of the production equipment.

Description

technical field [0001] The invention relates to the field of detection equipment, in particular to a detection device and detection method for the remaining amount of a metal source, and evaporation equipment. Background technique [0002] Copper indium gallium selenide (CIGS) solar cells have the remarkable characteristics of low production cost, less pollution, no fading, and good low-light performance, and have become the focus of solar cell research and development. [0003] In the process of production and trial production of copper indium gallium selenide solar cells, it is necessary to use evaporation methods to make functional film layers on the substrate. Specifically, metal source fillers are placed in the crucible, and then the metal source fillers are evaporated by heating. , and then deposited on the substrate to form a functional film layer. However, no matter in trial production or large-scale production, the amount of metal source filler remaining in the cru...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01F23/296C23C14/24C23C14/18
Inventor 徐义岳志远
Owner 上海祖强能源有限公司
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