Electron beam device and manufacturing method thereof
A manufacturing method and electron beam technology, applied in the field of electronics, can solve the problems of large size and high power consumption, etc.
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example 1
[0035] An insulating layer is provided on the surface of the GaN / AlGaN composite layer, and the modulation input end and the modulation output end include: a window opened on the insulating layer with a preset distance from the cathode and the anode respectively, and depositing A metal layer, wherein the metal layer forms a metal-semiconductor contact with the GaN / AlGaN composite layer.
[0036] Wherein, the insulating layer includes but not limited to Si 3 N 4 In the insulating layer, the width of the window is 0.5-50 microns, and the preset distance is 1-50 microns. For example, when fabricating the modulation input end and the modulation output end according to this embodiment, Si 3 N 4 Si is etched away on the insulating layer 3 N 4 , forming a 0.5 micron wide window, and depositing a metal layer in the window, so that the metal layer forms a metal-semiconductor contact with the GaN / AlGaN composite layer, so as to obtain a modulation input terminal and a modulation ou...
example 2
[0038] The surface of the GaN / AlGaN composite layer is provided with an insulating layer, and the modulation input end and the modulation output end include: a window opened on the insulating layer with a preset distance from the cathode and the anode respectively, and a gate deposited in the window A dielectric layer and a metal layer deposited on the gate dielectric layer, wherein the bottom of the window extends into the GaN / AlGaN composite layer.
[0039] Wherein, the insulating layer includes but not limited to Si 3 N 4 insulating layer, the gate dielectric layer may include SiO 2 layer, the SiO 2 The thickness of the layer is 1-500 nanometers, and the preset distance is 1-50 micrometers. For example, when fabricating the modulation input terminal and the modulation output terminal according to this embodiment, Si can be etched away at a distance of 20 microns from the cathode and the anode, respectively. 3 N 4 , and then continue to etch down into the GaN / AlGaN comp...
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