Two-cavity closed type liquid static pressing guiding rail sliding block module

Abstract

The invention discloses a two-cavity closed type liquid static pressing guiding rail sliding block module, and relates to the field of liquid static pressing throttling device. The module comprises asliding block body and a pressure sensor and a flow rate controller which are connected with the sliding block body, and the sliding block body is provided with a sliding block body oil inlet, at least one oil cavity and oil out flow dividing ports and oil inlet flow dividing ports with the number the same as the oil cavity; the oil cavity is provided with an oil cavity oil outlet, the outlet flowdividing hole is communicated with the sliding block oil inlet, and the oil inlet flow dividing hole is communicated with the oil cavity oil outlet; the periphery of the oil cavity is provided with amicrotexture oil sealing face; the flow rate controller is provided with a flow rate controller oil inlet and a flow rate controller oil outlet, the flow rate controller oil inlet is communicated with the oil outlet flow dividing hole, and the flow rate controller oil outlet is communicated with the oil inlet flow dividing hole; the pressure sensor is communicated with the oil cavity to monitor the oil pressure of the oil cavity. The module has the advantages that a linear shaft machine platform with the module has high oil film stiffness and high bearing capacity, and a better motion linearity can be achieved.

Description

technical field [0001] The invention relates to the field of hydrostatic pressure throttling devices, in particular to a two-cavity closed hydrostatic guide rail slider module. Background technique [0002] Hydrostatic bearings are widely used in ultra-precision machine tools and ultra-precision measuring instruments because of their advantages such as high motion accuracy, low frictional resistance, long service life and good anti-vibration performance. [0003] The restrictor is an indispensable key element in the constant pressure oil supply hydrostatic support system, which can automatically adjust the pressure of the oil chamber, so that the constant pressure oil supply hydrostatic support system has the corresponding oil film bearing capacity and oil film stiffness. Commonly used fixed restrictors mainly include capillary restrictors and small hole restrictors. Although the structure is simple, the throttling ratio cannot be adjusted and the stiffness of the oil film i...

AI Technical Summary

Problems solved by technology

Commonly used fixed restrictors mainly include capillary restrictors and small hole restrictors. Although the structure is simple, the throttling ratio cannot be adjusted and the stiffness of the oil film is limited; the commonly used variable restrictors mainly include thin film restrictors and sliding restrictors. Cutting throttle, although the internal throttling ratio is adjustable and has greater oil film stiffness, it cannot control the throttling ratio in real time and actively

In addition, traditional hydrostatic guide rails do not have a pressure sensor as a direct feedback of oil chamber pressure

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