Single silver LOW-E glass coating film production line

Abstract

The invention discloses a single silver LOW-E glass coating film production line, which comprises a substrate feeding zone, an inlet chamber, an inlet buffer chamber, an inlet conveying chamber, a sputtering chamber, an outlet conveying chamber, an outlet buffer chamber, an outlet chamber, a quality inspection chamber and a substrate unloading zone, wherein the substrate feeding zone, the inlet chamber, the inlet buffer chamber, the inlet conveying chamber, the sputtering chamber, the outlet conveying chamber, the outlet buffer chamber, the outlet chamber, the quality inspection chamber and the substrate unloading zone are sequentially connected, sequentially connected transmission tables are respectively arranged in the substrate feeding zone, the inlet chamber, the inlet buffer chamber,the inlet conveying chamber, the sputtering chamber, the outlet conveying chamber, the outlet buffer chamber, the outlet chamber and the substrate unloading zone, a coating film quality inspection table and a quality inspection system are arranged in the quality inspection chamber, the transmission table in the outlet chamber is connected to the coating film quality inspection table, the transmission table is used for conveying a vacuum film coating substrate, and the coating film quality inspection table is used for detecting the quality of the substrate. According to the present invention, with the single silver LOW-E glass coating film production line, the large-batch and low-cost production of various large-area coating films can be achieved, the sputter deposition rate is high, the process has strong versatility, and the production line is especially suitable for large-scale industrial production.

Description

technical field [0001] The invention relates to a single-silver LOW-E glass coating production line, belonging to the technical field of vacuum coating. Background technique [0002] Glass is an important building material. With the continuous improvement of decorative requirements for buildings, the use of glass in the construction industry is also increasing. However, when people choose glass doors and windows for buildings today, in addition to considering their aesthetic and appearance features, they pay more attention to issues such as thermal control, cooling costs, and the comfortable balance of internal sunlight projection. This makes the upstart in the coated glass family - Low-E glass stand out and become the focus of attention. [0003] Low-E glass, also known as low-emissivity glass, is a film system product composed of multiple layers of metal or other compounds coated on the glass surface. Its coating layer has the characteristics of high transmission of visi...

AI Technical Summary

Problems solved by technology

Therefore, these production lines cannot meet the requirements for coating LOW-E glass

[0018] With the rapid development of coating technology in the field of vacuum coating, the requirements for coating products are getting higher and higher, so more and more improvements have occurred in the coating production line, and the requirements of the production line have increased accordingly. The overall stability of the existing technology coating production line Sexuality and coating uniformity, low production efficiency and high equipment cost

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